Polymer field effect transistors made by laser patterning
Source abstract
Abstract
Polymer field effect transistors (PFETs) were made from polymeric semiconductors and insulators on flexible polymeric substrates. The electrodes were patterned from thin films of conducting polymers or metals using an excimer laser. This technique yields highly resolved source and drain electrode patterns with channel lengths below 10 μm which is a preposition for fast transistors and electronic circuits. Together with the available processing rates this technique makes a well-balanced compromise between pattern resolution and processing demands. Moreover, these PFETs show a long-term stability of more than two years without any special protection.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Thin-Film Transistor Technologies · Neuroscience and Neural Engineering · Advanced Memory and Neural Computing
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (26)
Show source-provided references
1. Koezuka · Synth. Met. · 1987 · 18 · 69910.1016/0379-6779(87)90964-7 ↗
2. Tsumura · Synth. Met. · 1988 · 25 · 1110.1016/0379-6779(88)90318-9 ↗
3. Drury · Appl. Phys. Lett. · 1998 · 73 · 10810.1063/1.121783 ↗
4. Gelinck · Appl. Phys. Lett. · 2000 · 77 · 148710.1063/1.1290728 ↗
5. Ullmann · Mat. Res. Soc. Symp. Proc. · 2001 · 665 · C7.5.110.1557/PROC-665-C7.5 ↗
6. Ficker · SPIE Int. Soc. Opt. Eng. · 2001 · 4466
7. H.-K. Roth, S. Sensfuss, M. Schrödner, R.-I. Stohn, A. Bernds, W. Clemens, Materialwiss. u. Werkstofftechnik. 32 (2001) 789.10.1002/1521-4052(200110)32:10<789::AID-MAWE789>3.3.CO;2-5 ↗
8. Sirringhaus · Synth. Met. · 1999 · 102 · 85710.1016/S0379-6779(98)00365-8 ↗
9. Sirringhaus · Science · 2000 · 290 · 212310.1126/science.290.5499.2123 ↗
10. Horowitz · Solid State Comm. · 1989 · 72 · 38110.1016/0038-1098(89)90121-X ↗
11. Horowitz · Eur. Phys. J. Appl. Phys. · 1998 · 1 · 36110.1051/epjap:1998157 ↗
12. Horowitz · Synth. Met. · 1991 · 41–43 · 112710.1016/0379-6779(91)91568-U ↗
13. Brown · Science · 1995 · 270 · 97210.1126/science.270.5238.972 ↗
14. Kelley · Mater. Res. Soc. Symp. Proc. · 2003 · 771 · L6.5.110.1557/PROC-771-L6.5 ↗
15. Xia · Adv. Mater. · 1996 · 8 · 101510.1002/adma.19960081217 ↗
16. Granlund · Adv. Mater. · 2000 · 12 · 26910.1002/(SICI)1521-4095(200002)12:4<269::AID-ADMA269>3.0.CO;2-5 ↗
17. Zschieschang · Adv. Mater. · 2003 · 15 · 114710.1002/adma.200305012 ↗
18. A. Huebler, U. Hahn, W. Beier, N. Lasch, T. Fischer, in: Proc. 2 Int. IEEE Conf. Polym. Adhesives Microelectron. Photon., 2002, p. 172.
19. A. Knobloch, A. Bernds, W. Clemens, in: Proc. 1 Int. IEEE Conf. Polym. Adhesives Microelectron. Photon., 2001, pp. 84–90.
20. Blanchet · Appl. Phys. Lett. · 2002 · 82 · 46310.1063/1.1533110 ↗
21. Fix · Appl. Phys. Lett. · 2002 · 81 · 173510.1063/1.1501450 ↗
22. de Leeuw · IEDM 2002 Tech Digest · 2002 · 293
23. H.-K. Roth, R.-I. Stohn, M. Schrödner, K. Schultheis, in: Proc. 1 Int. Conf. Technol. Polym. Electron. (TPE04), 2004, pp. 65–70.
24. M. Schrödner, H.-K. Roth, S. Sensfuss, K. Schultheis, e & i (6) (2003) 2056.
25. Scheinert · J. Appl. Phys. · 2002 · 92 · 33010.1063/1.1486253 ↗
26. M. Schrödner, S. Sensfuss, H.-K. Roth, R.-I. Stohn, W. Clemens, A. Bernds, Proc. 2. Internat. IEEE Conf. on Polymers and Adhesives in Microelectron. and Photonics, 2002, p. 188.