journal article·2019-07-30Open access

Stable InSe transistors with high-field effect mobility for reliable nerve signal sensing

Jianfeng Jiang, Jingxin Li, Yutao Li, Jiazhzhi Duan, Linshen Li, Ye Tian, Zhihua Zong, Haotian Zheng, Xianjin Feng, Qiqiang Li, Hong Liu, Yu Zhang, Tian-Ling Ren, Lin Han

Abstract

Abstract Among two-dimensional layered semiconductors, indium selenide (InSe) is one of the most promising materials with absolute advantages in field-effect transistors (FETs) because of its high electron mobility and stable material properties. Some work has been performed to improve the mobility of InSe FETs. However, in practical applications, electrical stability of FETs is another essential factor to guarantee the performance of the electronic system. Here, we show a highly stable InSe FET with a field-effect mobility of 1200 cm2/V·s in the practical working regime. The bottom-gate staggered InSe FET was fabricated with a polymethyl methacrylate (PMMA)/HfO2 dual-layer gate dielectric and PMMA back-channel encapsulation. The hysteresis was maintained at 0.4 V after 30 days of storage under normal ambient conditions, and the threshold voltage shift was retained at 0.6 V with a gate stress VGS of 10 V, which represents the best electrical stability reported to date. Its high mobility and electrical stability enable reliable detection of the weak nerve action potential at a low power consumption. High-performance InSe FETs expand their promising applications in flexible and in situ real-time intelligent nerve action potential recording.
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Research context

OpenAlex topics: 2D Materials and Applications · Advanced Memory and Neural Computing · Perovskite Materials and Applications

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References (43)

Show source-provided references
1. Radisavljevic, B., Radenovic, A., Brivio, J., Giacometti, V. & Kis, A. Single-layer MoS2 transistors. Nat. Nanotechnol. 6, 147–150 (2011).10.1038/nnano.2010.279 ↗
2. Wang, Q. H., Kalantar-Zadeh, K., Kis, A., Coleman, J. N. & Strano, M. S. Electronics and optoelectronics of two-dimensional transition metal dichalcogenides. Nat. Nanotechnol. 7, 699–712 (2012).10.1038/nnano.2012.193 ↗
3. Radisavljevic, B. & Kis, A. Mobility engineering and a metal–insulator transition in monolayer MoS2. Nat. Mater. 12, 815–820 (2013).10.1038/nmat3687 ↗
4. Deng., Y. et al. Gate-tunable room-temperature ferromagnetism in two-dimensional Fe3GeTe2. Nature 563, 94–99 (2018).10.1038/s41586-018-0626-9 ↗
5. Zhang, Y., Tan, Y.-W., Stormer, H. L. & Kim, P. Experimental observation of the quantum Hall effect and Berry’s phase in graphene. Nature 438, 201–204 (2005).10.1038/nature04235 ↗
6. Du, X., Skachko, I., Duerr, F., Luican, A. & Andrei, E. Y. Fractional quantum Hall effect and insulating phase of Dirac electrons in graphene. Nature 462, 192–195 (2009).10.1038/nature08522 ↗
7. Desai, S. B. et al. MoS2 transistors with 1-nanometer gate lengths. Science 354, 99–102 (2016).10.1126/science.aah4698 ↗
8. Cui, X. et al. Multi-terminal transport measurements of MoS2 using a van der Waals heterostructure device platform. Nat. Nanotech. 10, 534–540 (2015).10.1038/nnano.2015.70 ↗
9. Li, L. et al. Black phosphorus field-effect transistors. Nat. Nanotech. 9, 372–377 (2014).10.1038/nnano.2014.35 ↗
10. Bandurin, D. A. et al. High electron mobility, quantum Hall effect and anomalous optical response in atomically thin InSe. Nat. Nanotech. 12, 223–227 (2017).10.1038/nnano.2016.242 ↗
11. Lei, S. et al. Evolution of the electronic band structure and efficient photo-detection in atomic layers of InSe. ACS Nano 8, 1263–1272 (2014).10.1021/nn405036u ↗
12. Mudd, G. W. et al. Tuning the bandgap of exfoliated InSe nanosheets by quantum confinement. Adv. Mater. 25, 5714–5718 (2013).10.1002/adma.201302616 ↗
13. Feng, W., Zheng, W., Cao, W. & Hu, P. Back gated multilayer InSe transistors with enhanced carrier mobilities via the suppression of carrier scattering from a dielectric interface. Adv. Mater. 26, 6587–6593 (2014).10.1002/adma.201402427 ↗
14. Sucharitakul, S. et al. Intrinsic electron mobility exceeding 103cm2 /Vs in multilayer InSe FETs. Nano Lett. 15, 3815–3819 (2015).10.1021/acs.nanolett.5b00493 ↗
15. Li, M. et al. High mobilities in layered inse transistors with indium-encapsulation-induced surface charge doping. Adv. Mater. 30, 1803690 (2018).10.1002/adma.201803690 ↗
16. Lee, G. et al. Highly stable, dual-gated MoS2 transistors encapsulated by hexagonal boron nitride with gate-controllable contact, resistance, and threshold voltage. ACS Nano 9, 7019–7026 (2015).10.1021/acsnano.5b01341 ↗
17. Kim, S. et al. Enhanced carrier mobility of multilayer MoS2 thin-film transistors by Al2O3 encapsulation. Appl. Phys. Lett. 109, 152101 (2016).10.1063/1.4964606 ↗
18. Yu, Z. et al. Towards intrinsic charge transport in monolayer molybdenum disulfide by defect and interface engineering. Nat. Commun. 5, 5290 (2014).10.1038/ncomms6290 ↗
19. Ho, P. et al. High-mobility InSe transistors: the role of surface oxides. ACS nano 11, 7362–7370 (2017).10.1021/acsnano.7b03531 ↗
20. Cho, K. et al. Electric stress-induced threshold voltage instability of multilayer MoS2 field effect transistors. ACS nano 7, 7751–7758 (2014).10.1021/nn402348r ↗
21. Late, D. J. et al. Hysteresis in single-layer MoS2 field effect transistors. ACS nano 6, 5635–5641 (2012).10.1021/nn301572c ↗
22. Feng, W. et al. Gate modulation of threshold voltage instability in multilayer inse field effect transistors. ACS Appl. MAter. Interface 7, 26691–26695 (2015).10.1021/acsami.5b08635 ↗
23. Ghatak, S., Pal, A. N. & Ghosh, A. Nature of electronic states in atomically thin MoS2 field-effect transistors. ACS Nano. 5, 7707–7712 (2011).10.1021/nn202852j ↗
24. Stanford, M. G. et al. Lithographically patterned metallic conduction in single-layer MoS2 via plasma processing. npj 2D Mater. Appl. 3, 13 (2019).10.1038/s41699-019-0095-5 ↗
25. Ouyang, B. et al. Tunable phase stability and contact resistance of monolayer transition metal dichalcogenides contacts with metal. npj 2D Mater. Appl. 2, 13 (2018).10.1038/s41699-018-0059-1 ↗
26. Silberberg, D. et al. Brain and other nervous system disorders across the lifespan-global challenges and opportunities. Nature 527, S151–S154 (2015).10.1038/nature16028 ↗
27. LeDoux, J. et al. Surviving threat: neural circuit and computational implications of a new taxonomy of defensive behavior. Nat. Rev. Neurosci. 19, 269–282 (2018).10.1038/nrn.2018.22 ↗
28. Kang, S. K. et al. Bioresorbable silicon electronic sensors for the brain. Nature 530, 71–76 (2016).10.1038/nature16492 ↗
29. Bedrosian, T. A. et al. Early life experience drives structural variation of neural genomes in mice. Science 359, 1395–1399 (2018).10.1126/science.aah3378 ↗
30. Bryson, J. B. et al. Optical control of muscle function by transplantation of stem cell–derived motor neurons in mice. Science 344, 94–97 (2014).10.1126/science.1248523 ↗
31. Bouton, C. E. et al. Restoring cortical control of functional movement in a human with quadriplegia. Nature 533, 247–250 (2016).10.1038/nature17435 ↗
32. Tybrandt, K. et al. High-density stretchable electrode grids for chronic neural recording. Adv. Mater. 30, 1706520 (2018).10.1002/adma.201706520 ↗
33. Rivnay et al. Next-generation probes, particles, and roteins for neural interfacing. Sci. Adv. 3, e1601649 (2017).10.1126/sciadv.1601649 ↗
34. Kim, D. et al. Epidermal electronics. Science 333, 838–843 (2011).10.1126/science.1206157 ↗
35. Yang, Z. et al. Wafer-scale synthesis of high-quality semiconducting two-dimensional layered InSe with broadband photoresponse. ACS nano 11, 4225–4236 (2017).10.1021/acsnano.7b01168 ↗
36. Bao, W. et al. High mobility ambipolar MoS2 field-effect transistors: substrate and dielectric effects. Appl. Phys. Lett. 102, 042104 (2013).10.1063/1.4789365 ↗
37. Perdew, J. P. et al. Atoms, molecules, solids, and surfaces: applications of the generalized gradient approximation for exchange and correlation. Phys. Rev. B 46, 6671 (1992).10.1103/PhysRevB.46.6671 ↗
38. Kresse, G. et al. Efficient iterative schemes for ab initio total-energy calculations using a plane-wave basis set. Phys. Rev. B 54, 11169 (1996).10.1103/PhysRevB.54.11169 ↗
39. Kresse, G. et al. Vienna Ab-initio Simulation Package (VASP): the Guide. Universität Wien, VASP-Guide (2002).
40. Perdew, J. P. et al. Ernzerhof, generalized gradient approximation made simple. Phys. Rev. Lett. 77, 3865 (1996).10.1103/PhysRevLett.77.3865 ↗
41. Aji, A. S. et al. High mobility WS2 transistors realized by multilayer graphene electrodes and application to high responsivity flexible photodetectors. Adv. Mater. 27, 1703448 (2017).
42. Li, L. et al. 2D GeP: an unexploited low-symmetry semiconductor with strong in-plane anisotropy. Adv. Mater. 30, 1706771 (2018).10.1002/adma.201706771 ↗
43. Song, H. S. et al. High-performance top-gated monolayer SnS2 field-effect transistors and their integrated logic circuits. Nanoscale 5, 9666–9670 (2013).10.1039/c3nr01899g ↗