Novel shock wave excitation method for dynamic characterization of microstructures
Source abstract
Abstract
A novel shock wave excitation method for dynamic characterization of MEMS microstructures was proposed. A typical shock wave excitation device mainly includes a needle electrode, a plate electrode, a high-voltage capacitor, a base structure and a feeder. The principle of this method is as follows. The testing microstructure was installed on the surface of the base structure supported by a rigid platform. The plate electrode was attached on the opposite surface. The needle electrode was mounted on the feeder. Adjusting the feeder, the shock wave will be generated as soon as the gap distance between two electrodes meets the requirements of electrical discharging. The base structure will be impacted by the shock wave. Thus the testing microstructure will be excited by the movement of the base structure. A dynamic measurement system for microcantilevers were developed. In the system, the shock wave excitation device was used to excite the testing microcantilevers. T-shaped piezoresistive microcantilevers were fabricated to get the vibration response. The experiments on the dynamic characteristics measurement for microcantilevers were carried out. The results show the shock wave excitation method is effective for MEMS dynamic characterization.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Advanced MEMS and NEMS Technologies · Mechanical and Optical Resonators · Force Microscopy Techniques and Applications
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (21)
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