JournalsMICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
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MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

SPRINGER HEIDELBERG

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An area-efficient high-Q adjacent stack zigzag-polygonal on- chip inductor using customized metal stacking in TSMC 180-nm technology

Naveen Manchala, Bheema Rao Nistala

Abstract On-chip inductors implemented using regular metal stacking generally suffer fromlow inductance and poor quality factor at millimeter-wave frequencies. In this work,a zigzag polygonal inductor is proposed by adding a metal layer in parallel with theexisting metal stack of TSMC 180nm technology, which results in an increase of 43%and 155% in inductance and Q-factor, resp…

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Microsystem Technologies·2026Open access
Improving the performance of thermal flow sensors by the integration of silica aerogels

Tobias Trautmann, Ana Luiza Silveira Fiates Braun, Michael J. Vellekoop

Abstract Highly sensitive thermal flow sensors are usually fabricated with heaters and temperature sensors on fragile membranes. To expand the application areas of such sensors, the membranes can be supported by other materials to achieve a greater robustness. However, most supporting materials degrade the sensor performance because they provide an additional heat-transfer path…

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Microsystem Technologies·2026Open access
Impact of geometrical parameters on sensitivity and selectivity in InGaN notch-engineered AlGaN/GaN MOSHEMT biosensor

Girish Shankar Mishra, N. Mohankumar, T. R. Lenka, R. Saravanakumar et al.

Nanoscale devices have enabled AlGaN/GaN MOSHEMTs to serve as highly sensitive platforms for the detection of biomolecules, including proteins, enzymes, DNA, and cells, due to their superior electrical properties. These devices support rapid and precise biosensing, enhancing consumer access to healthcare applications such as blood glucose monitoring. FET-based biosensors, fabri…

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