BaTiO₃and TeO₂based gyroscopes for guidance systems: FEM analysis

This paper presents the design, modeling and finite element model simulation of a micro-electromechanical system based on the ternary ferroelectric compounds and paratellurite. The dynamic behavior of the sensor structure is described by the super position of its dominant vibration mode shapes. The resulting model still considers all the physical domains and is even able to capture nonlinear phenomena, such as the stress stiffening of constraint structures or frequency and stiffening caused by squeezed gas in the sensor cell. Process induced and thermally induced residual stresses and the resulting deformation of the transducer elements are considered.