journal article·2026-06Open access

A review on advances in epitaxial growth technology of MoS2 2D materials

Yang Wang, Zhou Jiang, Shaojie Zhang, Huayang Zhou, Tianhao Yu, Kaiming Zhou, Zhihan Sun, Wenbo Sun, Danyang Liu, Shaobo Gao

Abstract

As a typical two-dimensional transition metal disulfide compound, MoS 2 shows great potential for applications in electronic and optoelectronic devices due to its unique electronic, optical and mechanical properties. Therefore, the preparation of wafer-scale MoS 2 has become cutting-ledge research to optimize the performance of electronic devices. Epitaxial growth technology is a key method to prepare high-quality, large-area single-crystal MoS 2 films. This paper reviews the research progress of MoS 2 epitaxial growth in recent years, focusing on substrate selection, lattice orientation control, and the application of epitaxial growth technology in the preparation of MoS 2 films. By systematically analyzing the epitaxial growth of MoS 2 on different substrates, the effects of lattice matching, interfacial interactions, and growth kinetics during the epitaxial growth process are summarized, as well as introducing two novel epitaxy methods, remote epitaxial growth and gold stencil-assisted stripping techniques. Finally, the future development direction of MoS 2 epitaxial growth technology and its application prospect in optoelectronic devices are envisioned.
Source: openalex_inverted_index · Quality: baseline

Research context

OpenAlex topics: 2D Materials and Applications · Graphene research and applications · MXene and MAX Phase Materials

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References (53)

Show source-provided references
1. Stacking-mode confined growth of 2h-mote2/MoS2 bilayer heterostructures for uv–vis–ir photodetectors10.1016/j.nanoen.2018.04.055 ↗
2. Electronics and optoelectronics of two-dimensional transition metal dichalcogenides10.1038/nnano.2012.193 ↗
3. Science in the service of citizens and consumers10.1038/nnano.2010.263 ↗
4. Emerging photoluminescence in monolayer MoS210.1021/nl903868w ↗
5. High mobility MoS2 transistor with low schottky barrier contact by using atomic thick h-bn as a tunneling layer10.1002/adma.201602757 ↗
6. Electronics based on two-dimensional materials: status and outlook10.1007/s12274-020-2945-z ↗
7. Electronic devices and circuits based on wafer-scale polycrystalline monolayer MoS2 by chemical vapor deposition
8. Interface engineering of two-dimensional transition metal dichalcogenides towards next-generation electronic devices: recent advances and challenges10.1039/C9NH00743A ↗
9. Small footprint transistor architecture for photoswitching logic and in situ memory10.1038/s41565-019-0462-6 ↗
10. Frenkel-defected monolayer MoS2 catalysts for efficient hydrogen evolution10.1038/s41467-022-29929-7 ↗
11. The epitaxy of 2d materials growth10.1038/s41467-020-19752-3 ↗
12. Strategies, status, and challenges in wafer scale single crystalline two-dimensional materials synthesis10.1021/acs.chemrev.0c01191 ↗
13. Large-area epitaxial growth of transition metal dichalcogenides10.1021/acs.chemrev.3c00851 ↗
14. Substrates in the synthesis of two-dimensional materials via chemical vapor deposition10.1021/acs.chemmater.0c03549 ↗
15. Epitaxial monolayer MoS2 on mica with novel photoluminescence10.1021/nl401938t ↗
16. Epitaxial growth of centimeter-scale single-crystal MoS2 monolayer on au(111)10.1021/acsnano.0c01478 ↗
17. Highly reproducible epitaxial growth of wafer-scale single-crystal monolayer MoS2 on sapphire10.1002/smtd.202300165 ↗
18. Molecular beam epitaxy of highly crystalline monolayer molybdenum disulfide on hexagonal boron nitride10.1021/jacs.7b05131 ↗
19. Time-resolved arpes determination of a quasi-particle band gap and hot electron dynamics in monolayer MoS210.1021/acs.nanolett.1c02674 ↗
20. Tuning electrical conductance in bilayer MoS2 through defect-mediated interlayer chemical bonding10.1021/acsnano.0c03665 ↗
21. Lateral versus vertical growth of two-dimensional layered transition-metal dichalcogenides: thermodynamic insight into MoS210.1021/acs.nanolett.6b02443 ↗
22. Toward a mechanistic understanding of vertical growth of van der waals stacked 2d materials: a multiscale model and experiments10.1021/acsnano.7b07604 ↗
23. Oriented lateral growth of two-dimensional materials on c-plane sapphire10.1038/s41565-023-01445-9 ↗
24. The intrinsic thermodynamic difficulty and a step-guided mechanism for the epitaxial growth of uniform multilayer MoS2 with controllable thickness10.1002/adma.202201402 ↗
25. Revisiting the epitaxial growth mechanism of 2d tmdc single crystals
26. Wafer-scale highly oriented monolayer MoS2 with large domain sizes10.1021/acs.nanolett.0c02531 ↗
27. Eight in. Wafer-scale epitaxial monolayer MoS2
28. Epitaxial growth of wafer-scale molybdenum disulfide semiconductor single crystals on sapphire10.1038/s41565-021-00963-8 ↗
29. Interfacial atomic mechanisms of single-crystalline MoS2 epitaxy on sapphire
30. Batch production of 6-inch uniform monolayer molybdenum disulfide catalyzed by sodium in glass10.1038/s41467-018-03388-5 ↗
31. Recent progress in cvd growth of 2d transition metal dichalcogenides and related heterostructures
32. Ultrafast epitaxial growth of metre-sized single-crystal graphene on industrial cu foil10.1016/j.scib.2017.07.005 ↗
33. Misorientation-angle-dependent electrical transport across molybdenum disulfide grain boundaries10.1038/ncomms10426 ↗
34. Wafer-scale growth and transfer of highly-oriented monolayer MoS2 continuous films10.1021/acsnano.7b03819 ↗
35. Epitaxial single-crystal growth of transition metal dichalcogenide monolayers via the atomic sawtooth au surface10.1002/adma.202006601 ↗
36. Single-crystal MoS2 monolayer wafer grown on au (111) film substrates
37. Epitaxial growth of inch-scale single-crystal transition metal dichalcogenides through the patching of unidirectionally orientated ribbons10.1038/s41467-022-30900-9 ↗
38. Low-cost preparation of wafer-scale au(111) single crystals for the epitaxy of two-dimensional layered materials10.1021/acsnano.4c17431 ↗
39. Molecular beam epitaxy10.1016/0079-6786(75)90005-9 ↗
40. Molecular beam epitaxy10.1126/science.208.4446.916 ↗
41. Twisted epitaxy of gold nanodisks grown between twisted substrate layers of molybdenum disulfide10.1126/science.adk5947 ↗
42. Ultrathin quantum light source with van der waals nbocl2 crystal10.1038/s41586-022-05393-7 ↗
43. X. Li, X. Shi, D. Marian, D. Soriano, T. Cusati, G. Iannaccone, G. Fiori, Q. Guo, W. Zhao, Y. Wu, Rhombohedral-stacked bilayer transition metal dichalcogenides for high-performance atomically thin cmos devices, Sci. Adv. 9 eade5706, https://doi.org/10.1126/sciadv.ade5706.10.1126/sciadv.ade5706 ↗
44. Stacking effects on the electronic and optical properties of bilayer transition metal dichalcogenides MoS2, mose2, ws2, and wse210.1103/PhysRevB.89.075409 ↗
45. Interfacial epitaxy of multilayer rhombohedral transition-metal dichalcogenide single crystals10.1126/science.ado6038 ↗
46. Vapour-phase deposition of two-dimensional layered chalcogenides10.1038/s41578-023-00609-2 ↗
47. Two-dimensional czochralski growth of single-crystal MoS210.1038/s41563-024-02069-7 ↗
48. Hypotaxy of wafer-scale single-crystal transition metal dichalcogenides10.1038/s41586-024-08492-9 ↗
49. Remote epitaxy through graphene enables two-dimensional material-based layer transfer10.1038/nature22053 ↗
50. Electric field effect in atomically thin carbon films10.1126/science.1102896 ↗
51. Controlled crack propagation for atomic precision handling of wafer-scale two-dimensional materials10.1126/science.aat8126 ↗
52. Polarity governs atomic interaction through two-dimensional materials10.1038/s41563-018-0176-4 ↗
53. Fabrication of a microcavity prepared by remote epitaxy over monolayer molybdenum disulfide10.1021/acsnano.1c08779 ↗