Atomic Layer-Deposited Al-Doped ZnO Thin Films for Display Applications
Source abstract
Abstract
The integration of high uniformity, conformal and compact transparent conductive layers into next generation indium tin oxide (ITO)-free optoelectronics, including wearable and bendable structures, is a huge challenge. In this study, we demonstrate the transparent and conductive functionality of aluminum-doped zinc oxide (AZO) thin films deposited on glass as well as on polyethylene terephthalate (PET) flexible substrates by using an atomic layer deposition (ALD) technique. AZO thin films possess high optical transmittance at visible and near-infrared spectral range and electrical properties competitive to commercial ITO layers. AZO layers deposited on flexible PET substrates demonstrate stable sheet resistance over 1000 bending cycles. Based on the performed optical and electrical characterizations, several applications of ALD AZO as transparent conductive layers are shown—AZO/glass-supported liquid crystal (LC) display and AZO/PET-based flexible polymer-dispersed liquid crystal (PDLC) devices.
Source: crossref · Quality: baseline
Research context
OpenAlex topics: ZnO doping and properties · Thin-Film Transistor Technologies · Advanced Sensor and Energy Harvesting Materials
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Institute of Solid State Physics, Bulgarian Academy of Sciences, 1784 Sofia, Bulgaria
Institute of Optical Materials and Technologies, Bulgarian Academy of Sciences, 1113 Sofia, Bulgaria
Department of Photonics, National Chiao Tung University, Hsinchu 30010, Taiwan
Department of Electrophysics, National Chiao Tung University, Hsinchu 30010, Taiwan
Faculty of Engineering, South-West University “Neofit Rilski”, 2700 Blagoevgrad, Bulgaria
References (32)
Show source-provided references
1. Past achievements and future challenges in the development of optically transparent electrodes10.1038/nphoton.2012.282 ↗
2. Criteria for choosing transparent conductors10.1557/mrs2000.151 ↗
3. Transparent electrodes for efficient optoelectronics
4. Levy, D., and Castellon, E. (2018). Transparent Conductive Materials: Materials, Synthesis, Characterization, Applications, Wiley-VCH Verlag Gmbh &Co, KGaA. [1st ed.].
5. (2020, April 30). Transparent Conductive Films Market by Application (Smartphones, Tablets, Notebooks, LCDs, Wearable Devices), Material (ITO on Glass, ITO on PET, Metal Mesh, Silver Nanowires, Carbon Nanotubes), and Region-Global Forecast to 2026. Available online: https://www.marketsandmarkets.com/Market-Reports/transparent-conductive-film-market-59909084.html.
6. Transparent conducting Al-doped ZnO thin films prepared by pulsed laser deposition10.1143/JJAP.35.L56 ↗
7. The effect of front ZnO:Al surface texture and optical transparency on efficient light trapping in silicon thin-film solar cells10.1063/1.2715554 ↗
8. Heat treatment in hydrogen gas and plasma for transparent conducting oxide films such as ZnO, SnO2 and indium tin oxide10.1016/0040-6090(89)90100-4 ↗
9. CdTe solar cell with industrial Al:ZnO on soda-lime glass10.1016/j.tsf.2010.11.095 ↗
10. Development of CIGS2 solar cells with lower absorber thickness10.1016/j.solener.2009.05.005 ↗
11. Growth of transparent conductive Al-doped ZnO thin films and device applications10.1143/JJAP.45.8453 ↗
12. Sol–gel derived aluminum doped zinc oxide for application as anti-reflection coating in terrestrial silicon solar cells10.1016/j.tsf.2009.08.010 ↗
13. ZnO:Al thin films obtained by chemical spray: Effect of the Al concentration10.1016/S0169-4332(02)00011-9 ↗
14. Preparation and properties of transparent conducting zinc oxide and aluminium-doped zinc oxide films prepared by evaporating method10.1016/S0927-0248(99)00076-8 ↗
15. Optical and electrical properties of aluminum doped ZnO thin films grown by pulsed laser deposition10.1016/j.apsusc.2006.08.012 ↗
16. Room temperature deposition of Al-doped ZnO films on quartz substrates by radio-frequency magnetron sputtering and effects of thermal annealing10.1016/j.tsf.2010.07.048 ↗
17. Al-doped ZnO films deposited by reactive magnetron sputtering in mid-frequency mode with dual cathodes10.1143/JJAP.41.814 ↗
18. Atomic layer deposition of Al-doped ZnO thin films10.1116/1.4757764 ↗
19. A brief review of atomic layer deposition: From fundamentals to applications10.1016/j.mattod.2014.04.026 ↗
20. Transmittance from visible to mid infra-red in AZO films grown by atomic layer deposition system10.1016/j.solener.2012.01.022 ↗
21. Impact of the sequence of precursor introduction on the growth and properties of atomic layer deposited Al-doped ZnO films10.1116/1.5030990 ↗
22. Electron transport in Al-doped ZnO nanolayers obtained by atomic layer deposition10.1088/1742-6596/700/1/012040 ↗
23. Bi-layer Al2O3/ZnO atomic layer deposition for controllable conductive coatings on polypropylene nonwoven fiber mats10.1063/1.4804960 ↗
24. Yeh, P., and Gu, C. (2010). Optics of Liquid Crystal Display, Wiley Interscience.
25. Khoo, I.C. (1995). Liquid Crystals Physical Properties and Nonlinear Optical Phenomena, Wiley.
26. New figure of merit for transparent conductors10.1063/1.323240 ↗
27. Transparent conductive Al-doped ZnO films for liquid crystal displays10.1063/1.2206417 ↗
28. Atomic layer deposition prepared Al-doped ZnO for liquid crystal displays applications10.1007/s11082-018-1469-1 ↗
29. Properties, requirements and possibilities of smart windows for dynamic daylight and solar energy control in buildings: State-of-the-art10.1016/j.solmat.2009.08.021 ↗
30. Polymer-dispersed liquid crystal devices with graphene electrodes10.1364/OE.23.032149 ↗
31. Metallic Nanowire-based transparent electrodes for next generation flexible devices: A review10.1002/smll.201602581 ↗
32. Highly thermostable, flexible, transparent, and conductive films on polyimide substrate with an AZO/AgNW/AZO structure10.1021/am508704u ↗