journal article·2022-02-04Open access

Recent Advances in Metal-Oxide Thin-Film Transistors: Flexible/Stretchable Devices, Integrated Circuits, Biosensors, and Neuromorphic Applications

Yunchae Jeon, Donghyun Lee, Hocheon Yoo

Coatings· Volume 12· Issue 2

Abstract

Thin-film transistors using metal oxides have been investigated extensively because of their high transparency, large area, and mass production of metal oxide semiconductors. Compatibility with conventional semiconductor processes, such as photolithography of the metal oxide offers the possibility to develop integrated circuits on a larger scale. In addition, combinations with other materials have enabled the development of sensor applications or neuromorphic devices in recent years. Here, this paper provides a timely overview of metal-oxide-based thin-film transistors focusing on emerging applications, including flexible/stretchable devices, integrated circuits, biosensors, and neuromorphic devices. This overview also revisits recent efforts on metal oxide-based thin-film transistors developed with high compatibility for integration to newly reported applications.
Source: crossref · Quality: baseline

Research context

OpenAlex topics: Thin-Film Transistor Technologies · Advanced Memory and Neural Computing · Transition Metal Oxide Nanomaterials

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Department of Biomedical Engineering, Gachon University, 191 Hambangmoe-ro, Incheon 21936, Korea

Department of Electronic Engineering, Gachon University, 1342 Seongnam-daero, Seongnam 13120, Korea

Funding

Gachon University

References (100+)

Show source-provided references
1. Growth of low resistivity and high transparency boron-doped zinc oxide film by pulse laser deposition10.1016/j.precisioneng.2020.08.001 ↗
2. Enhanced optical transparency and electrical conductivity of Ba and Sb co-doped SnO2 thin films10.1016/j.jallcom.2020.153709 ↗
3. Choi, Y., Kim, H.-S., Lee, H., Choi, W., Kwon, S.J., Han, J.-H., and Cho, E.-S. (2021). Effects of Insertion of Ag Mid-Layers on Laser Direct Ablation of Transparent Conductive ITO/Ag/ITO Multilayers: Role of Effective Absorption and Focusing of Photothermal Energy. Materials, 14.10.3390/ma14185136 ↗
4. The optical analyses of the multilayer transparent electrode and the formation of ITO/Mesh-Ag/ITO multilayers for enhancing an optical transmittance10.1016/j.apsusc.2019.05.106 ↗
5. Woo, G., Lee, D.H., Heo, Y., Kim, E., On, S., Kim, T., and Yoo, H. (2021). Energy Band Engineering by Remote Doping of Self-Assembled Monolayer Leads to High-Performance IGZO/p-Si Heterostructure Photodetectors. Adv. Mater., 2107364.10.1002/adma.202107364 ↗
6. Recent advances of solution-processed metal oxide thin-film transistors10.1021/acsami.7b16010 ↗
7. Seo, J., and Yoo, H. (2021). Remote Doping Effects of Indium–Gallium–Zinc Oxide Thin-Film Transistors by Silane-Based Self-Assembled Monolayers. Micromachines, 12.10.3390/mi12050481 ↗
8. Scalability and homogeneity of slot die-coated metal oxide semiconductor for TFTs10.1002/jsid.450 ↗
9. Green synthesis of zinc oxide and copper oxide nanoparticles using aqueous extract of oak fruit hull (jaft) and comparing their photocatalytic degradation of basic violet 310.1007/s41742-018-0064-4 ↗
10. Nickel oxide (NiO) devices and applications: A review
11. Deep-UV-Enhanced Approach for Low-Temperature Solution Processing of IZO Transistors with High-k AlO x/YAlO x Dielectric10.1021/acsaelm.0c00444 ↗
12. How we made the IGZO transistor10.1038/s41928-018-0106-0 ↗
13. Ultra-low voltage metal oxide thin film transistor by low-temperature annealed solution processed LiAlO2 gate dielectric10.1007/s13391-019-00184-1 ↗
14. High Performance Indium-Gallium-Zinc Oxide Thin Film Transistor via Interface Engineering10.1002/adfm.202003285 ↗
15. A hardwired machine learning processing engine fabricated with submicron metal-oxide thin-film transistors on a flexible substrate10.1038/s41928-020-0437-5 ↗
16. Effect of interfacial layer on device performance of metal oxide thin-film transistor with a multilayer high-k gate stack10.1016/j.tsf.2018.05.024 ↗
17. Nonvolatile memory with extremely low-leakage indium-gallium-zinc-oxide thin-film transistor10.1109/JSSC.2012.2198969 ↗
18. Novel Tunnel-Contact-Controlled IGZO Thin-Film Transistors with High Tolerance to Geometrical Variability10.1002/adma.201902551 ↗
19. Bio-polysaccharide electrolyte gated photoelectric synergic coupled oxide neuromorphic transistor with Pavlovian activities10.1039/C9TC06749C ↗
20. Solution-Gated Ultrathin Channel Indium Tin Oxide-Based Field-Effect Transistor Fabricated by a One-Step Procedure that Enables High-Performance Ion Sensing and Biosensing10.1021/acsami.1c05830 ↗
21. Restickable oxide neuromorphic transistors with spike-timing-dependent plasticity and pavlovian associative learning activities10.1002/adfm.201804025 ↗
22. Metal oxide composite thin films made by magnetron sputtering for bactericidal application10.1016/j.jphotochem.2017.01.012 ↗
23. Preparation of γ-Bi2MoO6 thin films by thermal evaporation deposition and characterization for photocatalytic applications10.1016/j.cattod.2010.05.005 ↗
24. Opportunities for atomic layer deposition in emerging energy technologies10.1021/acsenergylett.9b00249 ↗
25. Low-Voltage Heterojunction Metal Oxide Transistors via Rapid Photonic Processing10.1002/aelm.202000028 ↗
26. Solution-processed all-oxide transparent high-performance transistors fabricated by spray-combustion synthesis10.1002/aelm.201500427 ↗
27. Flexography-printed In2O3 semiconductor layers for high-mobility thin-film transistors on flexible plastic substrate10.1002/adma.201502569 ↗
28. Inkjet-printed In2O3 thin-film transistor below 200 °C10.1021/am4025774 ↗
29. Depla, D., Mahieu, S., and Greene, J. (2010). Sputter deposition processes. Handbook of Deposition Technologies for Films and Coatings, Elsevier.10.1016/B978-0-8155-2031-3.00005-3 ↗
30. Hussain, S., Chae, J., Akbar, K., Vikraman, D., Truong, L., Naqvi, B.A., Abbas, Y., Kim, H.-S., Chun, S.-H., and Kim, G. (2019). Fabrication of robust hydrogen evolution reaction electrocatalyst using Ag2Se by vacuum evaporation. Nanomaterials, 9.10.3390/nano9101460 ↗
31. Comparative study on performance of IGZO transistors with sputtered and atomic layer deposited channel layer10.1109/TED.2019.2899586 ↗
32. Heterojunction oxide thin-film transistors with unprecedented electron mobility grown from solution10.1126/sciadv.1602640 ↗
33. 100 GHz zinc oxide Schottky diodes processed from solution on a wafer scale10.1038/s41928-020-00484-7 ↗
34. Low-temperature fabrication of high-performance metal oxide thin-film electronics via combustion processing10.1038/nmat3011 ↗
35. Hybrid organic–metal oxide multilayer channel transistors with high operational stability10.1038/s41928-019-0342-y ↗
36. Exploring the Leidenfrost Effect for the Deposition of High-Quality In2O3 Layers via Spray Pyrolysis at Low Temperatures and Their Application in High Electron Mobility Transistors10.1002/adfm.201606407 ↗
37. Role of the electronically-active amorphous state in low-temperature processed In2O3 thin-film transistors10.1039/D0MA00072H ↗
38. Coating Thickness Controls Crystallinity and Enables Homoepitaxial Growth of Ultra-Thin-Channel Blade-Coated In2O3 Transistors10.1002/aelm.202000354 ↗
39. Far-UV annealed inkjet-printed In2O3 semiconductor layers for thin-film transistors on a flexible polyethylene naphthalate substrate10.1021/acsami.6b14654 ↗
40. Moreira, M., Carlos, E., Dias, C., Deuermeier, J., Pereira, M., Barquinha, P., Branquinho, R., Martins, R., and Fortunato, E. (2019). Tailoring IGZO composition for enhanced fully solution-based thin film transistors. Nanomaterials, 9.10.3390/nano9091273 ↗
41. Fully flexible solution-deposited ZnO thin-film transistors10.1002/adma.201002163 ↗
42. Rapid photonic curing of solution-processed In2O3 layers on flexible substrates10.1016/j.apsusc.2019.02.038 ↗
43. Gate-bias stress stability of p-type SnO thin-film transistors fabricated by RF-sputtering10.1109/LED.2013.2291896 ↗
44. Indium oxide thin-film transistors fabricated by RF sputtering at room temperature10.1109/LED.2010.2046133 ↗
45. Novel top-gate zinc oxide thin-film transistors (ZnO TFTs) for AMLCDs10.1889/1.2451545 ↗
46. Effects of repetitive mechanical stress on flexible oxide thin-film transistors and stress reduction via additional organic layer10.1109/LED.2018.2839267 ↗
47. Introduction of lithography-compatible conducting polymer as flexible electrode for oxide-based charge-trap memory transistors on plastic poly (ethylene naphthalate) substrates10.1016/j.sse.2018.10.007 ↗
48. An organic–inorganic hybrid semiconductor for flexible thin film transistors using molecular layer deposition10.1039/D0TC05281G ↗
49. Thermal degradation of poly (dimethylsilylene) and poly (tetramethyldisilylene-co-styrene)10.1002/app.22813 ↗
50. Room-temperature fabrication of transparent flexible thin-film transistors using amorphous oxide semiconductors10.1038/nature03090 ↗
51. Metal oxide semiconductor thin-film transistors for flexible electronics10.1063/1.4953034 ↗
52. Plasma polymerization enabled polymer/metal–oxide hybrid semiconductors for wearable electronics10.1021/acsami.8b11094 ↗
53. An ‘aqueous route’for the fabrication of low-temperature-processable oxide flexible transparent thin-film transistors on plastic substrates10.1038/am.2013.11 ↗
54. A review on inkjet printing of nanoparticle inks for flexible electronics10.1039/C9TC01630A ↗
55. High-resolution electrohydrodynamic inkjet printing of stretchable metal oxide semiconductor transistors with high performance10.1039/C6NR05577J ↗
56. Stretchable polymer gate dielectric by ultraviolet-assisted hafnium oxide doping at low temperature for high-performance indium gallium tin oxide transistors10.1021/acsami.9b02935 ↗
57. Effect of mechanical stress on the stability of flexible InGaZnO thin-film transistors10.1080/15980316.2017.1294116 ↗
58. CMOS-technology-enabled flexible and stretchable electronics for internet of everything applications10.1002/adma.201504236 ↗
59. Stretchable organic semiconductor devices10.1002/adma.201601278 ↗
60. Impact of polyimide film thickness for improving the mechanical robustness of stretchable InGaZnO thin-film transistors prepared on wavy-dimensional elastomer substrates10.1021/acsami.9b08902 ↗
61. Stretchable active matrix of oxide thin-film transistors with monolithic liquid metal interconnects10.7567/APEX.11.126501 ↗
62. Buckled thin-film transistors and circuits on soft elastomers for stretchable electronics10.1021/acsami.7b08153 ↗
63. Mechanical Durability of Flexible/Stretchable a-IGZO TFTs on PI Island for Wearable Electronic Application10.1021/acsaelm.1c00806 ↗
64. Improvement in Mechanical Durability of Stretchable Charge-Trap Memory Transistors with Engineered Wavy-Dimensional Structures10.1021/acsaelm.0c00604 ↗
65. Metal oxide semiconductor nanomembrane–based soft unnoticeable multifunctional electronics for wearable human-machine interfaces10.1126/sciadv.aav9653 ↗
66. Chuang, C.S., Fung, T.C., Mullins, B.G., Nomura, K., Kamiya, T., Shieh, H.P.D., Hosono, H., and Kanicki, J. (2008). P-13: Photosensitivity of Amorphous IGZO TFTs for Active-Matrix Flat-Panel Displays, SID Symposium Digest of Technical Papers, Blackwell Publishing Ltd Wiley Online Library.10.1889/1.3069354 ↗
67. Electronic and optical properties of hafnium indium zinc oxide thin film by XPS and REELS10.1016/j.elspec.2011.12.004 ↗
68. Dual-gate low-voltage transparent electric-double-layer thin-film transistors with a top gate for threshold voltage modulation10.1039/C9RA10619G ↗
69. Transparent phototransistor with high responsivity, sensitivity, and detectivity from heterojunction metal oxide semiconductors10.1063/5.0014562 ↗
70. Bending stability of flexible amorphous IGZO thin film transistors with transparent IZO/Ag/IZO oxide–metal–oxide electrodes10.1016/j.jallcom.2016.07.169 ↗
71. All-amorphous-oxide transparent, flexible thin-film transistors. Efficacy of bilayer gate dielectrics10.1021/ja9103155 ↗
72. Kim, K.-T., Kang, S.-H., Nam, S.-J., Park, C.-Y., Jo, J.-W., Heo, J.-S., and Park, S.-K. (2021). Skin-Compatible Amorphous Oxide Thin-Film-Transistors with a Stress-Released Elastic Architecture. Appl. Sci., 11.10.3390/app11125501 ↗
73. Deep-ultraviolet sensing characteristics of transparent and flexible IGZO thin film transistors10.1016/j.jallcom.2019.152788 ↗
74. Transparent electronics using one binary oxide for all transistor layers10.1002/smll.201803969 ↗
75. Highly transparent IGZO-TFTs uses IGZO source and drain electrodes with a composite insulation layer structure10.1016/j.ijleo.2019.163654 ↗
76. Ultralow-Voltage Field-Effect Transistors Using Nanometer-Thick Transparent Amorphous Indium–Gallium–Zinc Oxide Films10.1021/acsanm.1c01326 ↗
77. Wu, G., Sahoo, A.K., Chen, D.W., and Chang, J. (2018). A comparative study of e-beam deposited gate dielectrics on channel width-dependent performance and reliability of a-IGZO thin-film transistors. Materials, 11.10.3390/ma11122502 ↗
78. Ding, X., Yang, B., Xu, H., Qi, J., Li, X., and Zhang, J. (2021). Low-Temperature Fabrication of IZO Thin Film for Flexible Transistors. Nanomaterials, 11.10.3390/nano11102552 ↗
79. Influence of Ga doping on electrical performance and stability of ZnO thin-film transistors prepared by atomic layer deposition10.1109/TED.2020.3000197 ↗
80. Hole mobility modulation of solution-processed nickel oxide thin-film transistor based on high-k dielectric10.1063/1.4953460 ↗
81. Kim, D.W., Kim, H.J., Lee, C., Kim, K., Bae, J.-H., Kang, I.-M., and Jang, J. (2021). Influence of Active Channel Layer Thickness on SnO2 Thin-Film Transistor Performance. Electronics, 10.10.3390/electronics10020200 ↗
82. Low-temperature and high-performance ZnSnO thin film transistor activated by lightwave irradiation10.1016/j.ceramint.2021.04.050 ↗
83. Improvement of the long-term stability of ZnSnO thin film transistors by tungsten incorporation using a solution-process method10.1039/C8RA02925C ↗
84. A digital library for a flexible low-voltage organic thin-film transistor technology10.1016/j.orgel.2017.08.028 ↗
85. A Modified NMOS Inverter With Rail-To-Rail Output Swing and Its Application in the Gate Driver Integrated by Metal Oxide TFTs10.1109/JEDS.2021.3098757 ↗
86. Dynamic logic circuits using a-IGZO TFTs10.1109/TED.2017.2738665 ↗
87. Full-swing clock generating circuits on plastic using a-IGZO dual-gate TFTs with pseudo-CMOS and bootstrapping10.1109/LED.2016.2571321 ↗
88. Ishida, K., Shabanpour, R., Boroujeni, B.K., Meister, T., Carta, C., Ellinger, F., Petti, L., Münzenrieder, N.S., Salvatore, G.A., and Tröster, G. (2014, January 10–12). 22.5 dB Open-Loop Gain, 31 kHz GBW Pseudo-CMOS Based Operational Amplifier with a-IGZO TFTs on a Flexible Film. Proceedings of the 2014 IEEE Asian Solid-State Circuits Conference (A-SSCC), Kaohsiung, Taiwan.10.1109/ASSCC.2014.7008923 ↗
89. Thin film complementary metal oxide semiconductor (CMOS) device using a single-step deposition of the channel layer10.1038/srep04672 ↗
90. Large-area (64 × 64 array) inkjet-printed high-performance metal oxide bilayer heterojunction thin film transistors and n-metal-oxide-semiconductor (NMOS) inverters10.1016/j.jmst.2021.01.003 ↗
91. High performance of full swing logic inverter using all n-types amorphous ZnSnO and SiZnSnO thin film transistors10.1063/1.4921791 ↗
92. Spray-Pyrolyzed High-k Zirconium-Aluminum-Oxide Dielectric for High Performance Metal-Oxide Thin-Film Transistors for Low Power Displays10.1002/admi.202100600 ↗
93. High-speed pseudo-CMOS circuits using bulk accumulation a-IGZO TFTs10.1109/LED.2014.2379700 ↗
94. Hu, L., Hong, Y., Shi, W., Ye, M., and Su, Y. (2020, January 23–25). Pseudo-NMOS Logic Circuits using ITO-Stabilized ZnO TFTs. Proceedings of the 2020 IEEE International Conference on Integrated Circuits, Technologies and Applications (ICTA), Nanjing, China.10.1109/ICTA50426.2020.9332028 ↗
95. Kaya, S., and Kulkarni, A. (October, January 29). A novel voltage-controlled ring oscillator based on nanoscale DG-MOSFETs. Proceedings of the 2008 International Conference on Microelectronics, Washington, DC, USA.10.1109/ICM.2008.5393792 ↗
96. Low-voltage high-speed ring oscillator with a-InGaZnO TFTs10.1109/JEDS.2020.2997101 ↗
97. Low-Voltage Operation of Ring Oscillators Based on Room-Temperature-Deposited Amorphous Zinc-Tin-Oxide Channel MESFETs10.1002/aelm.201900548 ↗
98. Water-soluble thin film transistors and circuits based on amorphous indium–gallium–zinc oxide10.1021/acsami.5b00086 ↗
99. High-speed, inkjet-printed carbon nanotube/zinc tin oxide hybrid complementary ring oscillators10.1021/nl5016014 ↗
100. A low-power ring oscillator using pull-up control scheme integrated by metal–oxide TFTs10.1109/TED.2017.2759226 ↗