journal article·2026-07

Electric-field-guided design of a microwave atmospheric-pressure plasma jet for stable high-flow, low-temperature PE-MOCVD of Y2O3 films

Bat-Orgil Erdenezaya, Md Shahiduzzaman, Ruka Yazawa, Yusuke Nakano, Md Akhtaruzzaman, Jean Michel Nunzi, Yasunori Tanaka, Tetsuya Taima, Tatsuo Ishijima

Ceramics International· Volume 52· Issue 16
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OpenAlex topics: Plasma Applications and Diagnostics · Plasma and Flow Control in Aerodynamics · Plasma Diagnostics and Applications

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