Synthesis and growth model of silicon oxide nanorods with bud-like structures

Abstract A simple route was developed to synthesize amorphous silicon oxide nanorods with bud-like structures on Si (1 1 1) wafers, using SiCl 4 as Si source and Au as catalyst in a flowing H 2 –5% Ar atmosphere, without using template and any additive. The nanostructures were characterized using field-emission scanning electron microscopy, transmission electron microscopy equipped with energy dispersive X-ray spectroscopy. Each silicon oxide nanorod with a bud-like structure at its tip has smooth surface and uniform diameter. The growth of the silicon oxide nanostructures may follow Solid–Vapor–Liquid–Solid and Vapor–Liquid–Solid mechanisms.