A novel rapid electropulsing treatment on AZO thin ceramic films
Source abstract
Abstract
Abstract AZO thin films were deposited on quartz glass and were treated with electropulsing. Effect of the electropulsing on AZO films was investigated by X-ray diffraction (XRD), scanning electron microscopy(SEM), Atomic Force Microscopy (AFM), Hall Effect measurement and UV–visible transmittance spectra. The results showed that AZO films treated with 8 min electropulsing treatment (EPT) presented better crystallization, higher visible transmittance with blue-shift, smooth surface and the lowest electrical resistivity of 8.8×10−4 Ω cm. However, further EPT would degenerate the film properties. After 8 min electropulsing, the electrical conductivity of the AZO thin films increased by about 81%. These results indicate that the fast and low-energy consumed EPT may be a promising substitution for traditional heat annealing.
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Research context
OpenAlex topics: Electromagnetic Effects on Materials · Acoustic Wave Resonator Technologies · ZnO doping and properties
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References (26)
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