High-rate deposition of a-Si:H using electron cyclotron resonance plasma
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Abstract
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Research context
OpenAlex topics: Thin-Film Transistor Technologies · Silicon Nanostructures and Photoluminescence · Silicon and Solar Cell Technologies
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References (7)
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4. Scott · Appl. Phys. Lett. · 1980 · 37 · 72510.1063/1.92059 ↗
5. Ogawa · Japan. J. appl. Phys. · 1981 · 20 · L63910.1143/JJAP.20.L639 ↗
6. Mejia · J. Non-Cryst. Solids · 1983 · 59&60 · 72710.1016/0022-3093(83)90274-0 ↗
7. Vanier · J. Appl. Phys. · 1984 · 56 · 181210.1063/1.334191 ↗