journal article·1999-09Open access

Spectroscopic Ellipsometry: a Non-destructive Technique for Surface Analysis

T. Schram, A. Franquet, H. Terryn, J. Vereecken

Advanced Engineering Materials· Volume 1· Issue 1

Abstract

New spectroscopic ellipsometry techniques are very promising for the non-destructive surface analysis of thin films on metals. Infrared spectroscopic ellipsometry allows the morphological and chemical characterization of these films, and recent results are presented here.
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Research context

OpenAlex topics: nanoparticles nucleation surface interactions

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