Fabrication of gadolinium zirconate films by laser CVD
Source abstract
Abstract
Abstract In the present work, Gadolinium zirconate (GZ) films were prepared by laser CVD (LCVD) method. The influence of preparation conditions, involving preheating temperature (Tpre) and laser output power density (Pl) on morphology, microstructure, substrate temperature (Tsub) and deposition rate was thoroughly investigated. An extended formation region of GZ films, based on Tpre and Pl values, was observed at a pressure of about 0.9 kPa. Laser irradiation mainly plays a photolytic role when Pl
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Research context
OpenAlex topics: High-Temperature Coating Behaviors · Nuclear Materials and Properties · Electronic and Structural Properties of Oxides
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