On the determination of the film hardness in hard film/substrate composites using depth-sensing indentation
Source abstract
Abstract
Abstract The main difficulty in the mechanical characterisation of thin films using depth-sensing indentation is the determination of the relative substrate and film contributions to the measured properties of the film/substrate composite. In this study, a three-dimensional numerical simulation of the Vickers hardness test is used to study the influence of the substrate and film mechanical properties on the composite's behaviour under depth-sensing indentation. The particular case of hard films on soft substrates is analysed. In order to understand the behaviour of the composite, a study of the plastic strain distribution under indentation of several composites is performed. A methodology to determine the relative film hardness, i.e. H F / H S ratio, is proposed. The methodology is successfully verified using fictitious and real composite materials.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Metal and Thin Film Mechanics · Advanced Surface Polishing Techniques · Advanced Sensor Technologies Research
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (33)
Show source-provided references
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