Property approach of Si based ZnO films under thermal shock
Source abstract
Abstract
Abstract ZnO and Al-doped ZnO (AZO) films were deposited on p-Si(100) wafers using magnetron sputtering, the effect of thermal shock on Si based films and its interface were evaluated by various characterization methods such as in-situ nanoscratch, atomic force microscope (AFM), X-ray diffraction (XRD), fourier transform infrared (FTIR) spectra and ultraviolet–visible diffuse reflectance spectroscopy (UV-DRS). The results show the adhesion strength of Si/ZnO interface is relatively stable under thermal shock, the surface grains of Si coated ZnO form dense clusters then refine them. XRD and FTIR show Si based films exhibit (002) orientation with good structural stability related to Zn–O bond, the interfacial reactions of Si based films could experience strong interaction through Si, Zn and O atoms located at Si/ZnO interface during thermal shock. Moreover, some comparatively prominent peaks are observed by UV-DRS, which caused by Si interacted with ZnO, the AZO films deposited on quartz glass substrates illustrate the optical properties are obviously influenced and degraded after thermal shock.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: ZnO doping and properties · Electronic and Structural Properties of Oxides · Semiconductor materials and devices
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (32)
Show source-provided references
1. Optoelectronic performances on different structures of Al‐doped ZnO[J]10.1111/jace.15818 ↗
2. Low temperature atomic layer deposition of ZnO: applications in photocatalysis[J]10.1016/j.apcatb.2016.05.015 ↗
3. Improved environmental stability of highly conductive nominally undoped ZnO layers suitable for n-type windows in thin film solar cells[J]10.1016/j.solmat.2016.11.015 ↗
4. Investigation on electronic and magnetic properties of Co and Mn in ZnO with different doping types[J]10.1016/j.jmmm.2018.04.041 ↗
5. Interpretation of photovoltaic performance of n-ZnO: Al/ZnS: Cr/p-GaP solar cell[J]10.1016/j.solmat.2017.05.003 ↗
6. Structure and interfacial properties investigation for ZnO/graphene interface[J]10.1016/j.matchemphys.2019.02.083 ↗
7. Porous Al-doped ZnO rods with selective adsorption properties[J]10.1016/j.apsusc.2017.03.018 ↗
8. DC‐sputtered ZnO: Al as transparent conductive oxide for silicon heterojunction solar cells with μc‐Si: H emitter[J]10.1002/pip.2570 ↗
9. High efficiency computer simulation for Au/n-ZnO/p-Si/Al Schottky-type thin film heterojunctions[J]10.1007/s12633-016-9430-z ↗
10. An exploratory review on some inorganic materials and structure of solar cells[J]10.1504/IJMSI.2017.087350 ↗
11. Photodetection properties of ZnO/Si heterojunction diode: a simulation study[J]10.1080/02564602.2016.1145558 ↗
12. Bifacial 8.3%/5.4% front/rear efficiency ZnO: Al/n-Si heterojunction solar cell produced by spray pyrolysis[J]10.1016/j.solener.2016.01.028 ↗
13. Mechanism of the photocatalytic activity of p-Si (100)/n-ZnO nanorods heterojunction[J]10.1016/j.matchemphys.2017.10.070 ↗
14. Mechanical properties of ZnO thin films deposited on polyester substrates used in flexible device applications[J]10.1016/j.tsf.2010.07.081 ↗
15. Mechanical property evaluation of ZnO thin films using nanoindentation and scanning probe microscope[C]//Advanced Materials Research
16. Preparation and mechanical properties of aluminum-doped zinc oxide transparent conducting films[J]10.1016/j.surfcoat.2008.06.024 ↗
17. Adhesion strength and nanomechanical characterization of ZnO thin films[J]10.1557/jmr.2017.85 ↗
18. Nanomechanical and microstructural characterization of sputter deposited ZnO thin films[J]10.1016/j.apsusc.2016.08.028 ↗
19. Nanoscratch study of ZnO thin films deposited using radio frequency magnetron sputtering[J]10.1016/j.nimb.2011.03.009 ↗
20. Nanotribological behavior of ZnO films prepared by atomic layer deposition[J]10.1016/j.jpcs.2013.09.016 ↗
21. Wind-power generators based on ZnO piezoelectric thin films on stainless steel substrates[J]10.1016/j.cap.2010.11.007 ↗
22. Li · 2012 · 725
23. Deposition of aluminum oxide-doped zinc oxide transparent nano-films on glass substrates for electrostatic discharge applications[J]10.1016/j.mssp.2012.03.008 ↗
24. Accelerated life testing (ALT) in microelectronics and photonics: its role, attributes, challenges, pitfalls, and interaction with qualification tests[J]10.1115/1.1486470 ↗
25. Study on interfacial interaction between Si and ZnO10.1016/j.ceramint.2019.07.200 ↗
26. Hacke · 2010 · 244
27. 2005
28. Electrophoretic deposition and characterization of nanocomposites and nanoparticles on magnesium substrates[J]10.1088/0957-4484/26/17/175102 ↗
29. FTIR and MAS NMR study of the zinc aluminosilicate ceramic glazes[J]10.1016/j.molstruc.2018.05.101 ↗
30. Nanoclay synergy in flame retarded/glass fibre reinforced polyamide 6[J]10.1016/j.polymdegradstab.2009.08.010 ↗
31. The inhibitive action of metacryloxypropylmethoxysilane (MAOS) on aluminium corrosion in NaCl solutions[J]10.1016/S0010-938X(98)00161-9 ↗
32. Relations between the structural characteristics and compressive strength in metakaolin based geopolymers with different molar Si/Al ratios[J]10.1016/j.ceramint.2015.04.125 ↗