journal article·2021-02

Electrical property of joints made of polymer-derived SiAlCN ceramic via adhesive joining

Yigao Chen, Yejie Cao, Yiguang Wang

Ceramics International· Volume 47· Issue 3
Publisher page

Abstract

Abstract Electrical property of joints made with polymer-derived silicoaluminum carbonitride (SiAlCN) ceramics was investigated. SiAlCN ceramics were successfully joined using polycarbosilane precursor as joining medium at 1123 K and 250 kPa. The maximum tensile strength of obtained joints reached ~3 MPa, meeting strength requirement of sensor fabrication. DC and AC conductivity of joints were measured in temperature range of 373–823 K, and were shown to follow band tail hopping mechanism. Conductive behavior of joints was evaluated via comparison with free SiAlCN ceramics. Unique amorphous structures of SiAlCN substrate and joining layer played important role in overall electrical properties. Therefore, the prepared joints presented practical application in high-temperature sensors based on polymer-derived ceramics.
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Research context

OpenAlex topics: Advanced ceramic materials synthesis · Electrical and Thermal Properties of Materials · Thermal properties of materials

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References (32)

Show source-provided references
1. Oxidation/corrosion of polymer‐derived SiAlCN ceramics in water vapor10.1111/j.1551-2916.2005.00791.x ↗
2. Synthesis under NH3 and thermal behaviour of SiCNAlO polymer-derived nanopowders10.1016/j.jeurceramsoc.2007.09.047 ↗
3. Polymer-derived Si-Al-C-N-O ceramics for high temperature applications
4. Polymer-derived SiAlCN ceramics resist oxidation at 1400 °C10.1016/j.scriptamat.2006.05.004 ↗
5. Development of a wireless temperature sensor using polymer-derived ceramics
6. Temperature sensor made of polymer-derived ceramics for high-temperature applications10.1016/j.sna.2014.08.012 ↗
7. Novel polymer derived ceramic-high temperature heat flux sensor for gas turbine environment
8. Polymer-derived SiBCN ceramic pressure sensor with excellent sensing performance10.1007/s40145-020-0377-6 ↗
9. Fabrication of SiCN ceramic MEMS using injectable polymer-precursor technique10.1016/S0924-4247(00)00545-8 ↗
10. Fabrication of bonded SiC structure with cavity based on direct bonding process for MEMS device applications10.1007/s00542-015-2710-5 ↗
11. Direct bonding of silicon carbide with hydrofluoric acid treatment for high-temperature pressure sensors10.1016/j.ceramint.2019.10.123 ↗
12. Vacuum packaging for microsensors by glass-silicon anodic bonding10.1016/0924-4247(94)80003-0 ↗
13. Room-temperature bonding of single-crystal diamond and Si using Au/Au atomic diffusion bonding in atmospheric air10.1016/j.mee.2018.03.025 ↗
14. Room temperature bonding of Si and Si wafers by using Mo/Au nano-adhesion layers10.1016/j.mee.2019.111018 ↗
15. Adhesive wafer bonding with ultra-thin intermediate polymer layers10.1016/j.sna.2017.04.018 ↗
16. An adhesive bonding approach by hydrogen silsesquioxane for silicon carbide-based LED applications10.1016/j.mssp.2018.10.028 ↗
17. SiAlON ceramics from preceramic polymers and nano-sized fillers: application in ceramic joining10.1016/j.jeurceramsoc.2011.02.035 ↗
18. Joining of SiCf/SiC using polycarbosilane and polysilazane preceramic mixtures10.1016/j.ceramint.2018.03.061 ↗
19. Joining of reaction-bonded silicon carbide using a preceramic polymer10.1023/A:1004312109836 ↗
20. Fabrication of grooves on polymer-derived SiAlCN ceramics using femtosecond laser pulses10.1016/j.ceramint.2020.01.209 ↗
21. Femtosecond laser pulse ablation characteristics of polymer-derived SiAlCN ceramics10.1016/j.ceramint.2019.12.243 ↗
22. The stability and repeatability of high temperature electrical properties of SiAlCN ceramic sensor heads10.1016/j.ceramint.2019.01.053 ↗
23. Hyde · 1971
24. Highly-reliable temperature sensor using RF-sputtered SiC thin film10.1063/1.1135988 ↗
25. Temperature dependence of the energy gap in semiconductors10.1016/0022-3697(79)90162-8 ↗
26. Electric conductivity and microstructure evolution of polymer-derived SiAlCO ceramics10.1016/j.ceramint.2015.11.073 ↗
27. Electronic processes in non-crystalline materials
28. Preparation and temperature-resistance characteristics of novel dense SiAlCN ceramics10.1016/j.ceramint.2018.09.016 ↗
29. Electron transport in polymer‐derived amorphous silicon oxycarbonitride ceramics10.1111/j.1551-2916.2009.03044.x ↗
30. Temperature dependent AC electric conduction of polymer-derived SiAlCN ceramics10.1016/j.ceramint.2018.02.043 ↗
31. Frequency-dependent conductive behavior of polymer-derived amorphous silicon carbonitride10.1016/j.actamat.2015.02.020 ↗
32. Polymer‒derived ceramics: 40 years of research and innovation in advanced ceramics10.1111/j.1551-2916.2010.03876.x ↗