Fabrication of piezoelectric thick-film stator using electrohydrodynamic jet printing for micro rotary ultrasonic motors
Source abstract
Abstract
Abstract This paper proposes a lead zirconate titanate (PZT) thick-film piezoelectric microstator based on a high-performance PZT thick film fabricated by electrohydrodynamic jet (E-jet) printing. The PZT thick film element was printed directly on the elastic body from a PZT composite slurry to form the piezoelectric microstator. This fabrication process does not require conventional machining techniques such as thinning, bonding, and etching, and can be compatible with microelectromechanical systems (MEMS) technology. The printed PZT thick-film element exhibited compact and uniform features. The thick-film microstator produced a travelling wave with an amplitude of 345 nm, and the mechanical quality factor was found to be 736. The combination of E-jet printing and PZT thick-film technology simplified the manufacturing process and enhanced the performance of the piezoelectric stator, enabling the fabrication of a unique MEMS rotary ultrasonic motor device.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Electrowetting and Microfluidic Technologies · Advanced Sensor and Energy Harvesting Materials · Soft Robotics and Applications
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (45)
Show source-provided references
1. Shafik · 2016 · 33
2. Modeling and two-input sliding mode control of rotary traveling wave ultrasonic motors10.1109/TIE.2018.2798570 ↗
3. Temperature-insensitive (K,Na)NbO3-based lead-free piezo-actuator ceramics10.1002/adfm.201203754 ↗
4. Piezoelectric actuator for machining on macro-to-micro cylindrical components by a precision rotary motion control10.1016/j.ymssp.2018.05.035 ↗
5. Identification of micropositioning stage with piezoelectric actuators10.1016/j.ymssp.2015.12.032 ↗
6. A traveling wave ultrasonic motor with a metal/polymer-matrix material compound stator10.1088/1361-665X/aa9cc4 ↗
7. A novel dual stator-ring rotary ultrasonic motor10.1016/j.sna.2012.11.009 ↗
8. Design and performance analysis of a rotary traveling wave ultrasonic motor with double vibrators10.1016/j.ultras.2016.06.004 ↗
9. New considerations about the fracture mode of PZT ceramics10.1016/j.jeurceramsoc.2005.03.074 ↗
10. Rudy · 2012 · 1
11. Integrated thin film piezoelectric traveling wave ultrasonic motors10.1016/j.sna.2011.12.029 ↗
12. F. Qin, G. Dai, X. Sun, Q. Xu, Y. Du, J. Bao, A novel PZT-based traveling-wave micromotor with high performance and unconstrained coaxial rotation, J. Microelectromech. Syst., PP: 1-8.
13. Flexural-standing-wave elastic force motor using ZnO and PZT thin film on micromachined silicon membranes for wristwatch applications10.1088/0964-1726/7/3/015 ↗
14. Flexible vibrational energy harvesting devices using strain-engineered perovskite piezoelectric thin films10.1016/j.nanoen.2018.10.068 ↗
15. The emancipation of ferroelectricity10.1038/nmat1797 ↗
16. Bottom and top electrodes nature and PZT film thickness influence on electrical properties10.1016/j.sna.2009.11.032 ↗
17. Interface modifications of lead zirconate titanate thin films10.1080/00150191003697328 ↗
18. Interface-induced nonswitchable domains in ferroelectric thin films10.1038/ncomms5693 ↗
19. Effect of manganese doping on the size effect of lead zirconate titanate thin films and the extrinsic nature of ‘dead layers’10.1088/0953-8984/22/5/055901 ↗
20. Uchino · 1996
21. Chan · 2011 · 13
22. All-inkjet-printed flexible piezoelectric generator made of solvent evaporation assisted BaTiO3 hybrid material10.1016/j.nanoen.2017.09.046 ↗
23. An overview of thick film hybrid materials
24. Electrohydrodynamic jet printing of PZT thick film micro-scale structures10.1016/j.jeurceramsoc.2015.05.013 ↗
25. Fabrication and characterisation of substrate-free PZT thick films10.1016/j.ceramint.2018.05.030 ↗
26. Direct writing of lead zirconate titanate piezoelectric structures by electrohydrodynamic atomisation10.1007/s10832-007-9029-2 ↗
27. Improvement of composite sol–gel process for manufacturing 40 μm piezoelectric thick films10.1016/j.jeurceramsoc.2007.10.014 ↗
28. Preparation of Pb(Zr0.53Ti0.47)O3 thick films by an interfacial polymerization method on silicon substrates and their electric and piezoelectric properties10.1143/JJAP.39.5604 ↗
29. Effect of sintering aid and repeated sol infiltrations on the dielectric and piezoelectric properties of a PZT composite thick film10.1016/S0955-2219(02)00062-6 ↗
30. Effect of sintering conditions on characteristics of PbTiO3–PbZrO3–Pb(Mg1/3Nb2/3)O3–Pb(Zn1/3Nb2/3)O310.1016/j.mseb.2004.03.028 ↗
31. Biomimetic porifera skeletal structure of lead-free piezocomposite energy harvesters10.1021/acsami.8b13261 ↗
32. High piezoelectric property and low dielectric constant PZN-PZT ceramics10.4028/www.scientific.net/KEM.336-338.7 ↗
33. Yang · 2011
34. A high-power linear ultrasonic motor using bending vibration transducer10.1109/TIE.2012.2233691 ↗
35. Micro ultrasonic motor using a cube with a side length of 0.5 mm10.1109/TMECH.2015.2511782 ↗
36. Morega · 2016 · 1
37. Traveling-wave piezoelectric linear motor Part I: the stator design10.1109/TUFFC.2007.318 ↗
38. The influence of an adhesive layer on the interaction between a piezo-actuator and an elastic 3D-layer and on the excited wave fields
39. Morega · 2015 · 609
40. Investigation of electrical properties & mechanical quality factor of piezoelectric material (PZT-4A)10.5370/JEET.2017.12.2.846 ↗
41. Losses in ferroelectric materials10.1016/j.mser.2015.01.002 ↗
42. Ultrasonic micro-motor with multilayer piezoelectric ceramic and chamfered driving tips10.1063/1.4963662 ↗
43. Windmill-type ultrasonic micromotor fabricated by thermoplastic green machining process10.1016/j.sna.2006.05.040 ↗
44. A shear-mode ultrasonic motor using potassium sodium niobate-based ceramics with high mechanical quality factor10.1143/JJAP.47.7702 ↗
45. Characterization of acceptor-doped (Ba, Ca)TiO3 “hard” piezoelectric ceramics for high-power applications10.1016/j.ceramint.2017.01.088 ↗