Effect of heat treatment atmosphere on the piezoresistivity of indium tin oxide ceramic strain sensor
Source abstract
Abstract
Abstract Indium tin oxide (ITO) strain sensors were prepared by RF magnetron sputtering, and then heat treated in nitrogen and air atmosphere, respectively. The effect of air and N2 heat treatment on the piezoresistivity of ITO ceramic strain sensors were investigated at 1200 °C. It was found that although both the ITO ceramic strain sensors heat treated in N2 and air had similar temperature coefficient of resistance (TCR), the ITO strain sensor heat treated in N2 had better resistance stability. In addition, the ITO strain sensor heat treated in N2 had a smaller but more stable gage factor, compared to that in air. These observations were attributed to the increased content of Sn4+ donors and the enhanced photon scattering due to smaller grain sizes after the incorporation of nitrogen into ITO lattice.
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Research context
OpenAlex topics: Advanced Sensor Technologies Research · Electrical and Thermal Properties of Materials · Sensor Technology and Measurement Systems
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
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