Study on the photocatalytic activities of TiO2 films prepared by reactive RF sputtering
Source abstract
Abstract
Abstract Titanium oxide (TiO 2 ) films were deposited on non-alkali glass by reactive radio frequency (RF) magnetron sputtering using a Ti metal target in this study. The deposition parameters employed to realize the photocatalytic activities of TiO 2 films include RF power, deposition time, argon–oxygen ratio (O 2 /(Ar + O 2 )) and substrate temperature. The orthogonal array and analysis of variance (ANOVA) were adopted to determine the effect of the deposition variables on characteristic properties and the optimal conditions. The results indicated that a higher photocatalytic activity of TiO 2 films could be achieved under RF power of 150 W, deposition time of 3 h, argon–oxygen ratio of 40% and substrate temperature of 80 °C. RF power and argon–oxygen ratio had a higher effect on the methylene blue (MB) absorbance. The validation experiments show an improved photocatalytic activities of 5% when the Taguchi method is used.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: TiO2 Photocatalysis and Solar Cells · Advanced Photocatalysis Techniques · ZnO doping and properties
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (33)
Show source-provided references
1. Effect of crystallinity of TiO2 on its photocatalytic action10.1016/0009-2614(91)90486-S ↗
2. Photocatalysis on TiO2 surfaces: principles, mechanisms, and selected results10.1021/cr00035a013 ↗
3. The preparation of the anatase and rutile forms of Ag–TiO2 and hydrogen production from methanol/water decomposition10.1016/j.matlet.2007.04.105 ↗
4. Preparation and spectroscopic characterization of visible light sensitized N doped TiO2 (rutile)10.1016/j.jssc.2008.10.012 ↗
5. Effect of chemical etching by sulfuric acid or H2O2–NH3 mixed solution on the photocatalytic activity of rutile TiO2 nanorods10.1016/j.apcata.2010.03.029 ↗
6. Structure and contribution to photocatalytic activity of the interfaces in nanofibers with mixed anatase and TiO2(B) phases10.1016/j.molcata.2009.10.002 ↗
7. Comparison of catalytic activities for photocatalytic and sonocatalytic degradation of methylene blue in present of anatase TiO2–CNT catalysts10.1016/j.ultsonch.2010.11.008 ↗
8. Growth of TiO2 thin film by reactive RF magnetron sputtering using oxygen radical10.1016/j.jallcom.2006.02.103 ↗
9. Preparation and properties of a magnetic-nanometer TiO2/Fe3O4 composite photocatalyst
10. Study on nanomagnets supported TiO2 photocatalysts prepared by a sol–gel process in reverse microemulsion combining with solvent-thermal technique10.1016/j.jhazmat.2009.04.040 ↗
11. Co-deposition of photocatalytic Fe doped TiO2 coatings by MOCVD10.1016/j.catcom.2005.12.023 ↗
12. Efficient photoelectrocatalytic activity of TiO2/Ti anode fabricated by metalorganic chemical vapor deposition (MOCVD)10.1016/j.elecom.2009.02.029 ↗
13. Investigation into the effects of deposition parameters on TiO2 photocatalyst thin films by rf magnetron sputtering10.1016/j.spmi.2009.05.007 ↗
14. Photocatalytic TiO2 films deposited by reactive magnetron sputtering with unipolar pulsing and plasma emission control systems10.1016/j.tsf.2005.08.252 ↗
15. Crystal structure and photocatalytic activity of TiO2 films deposited by reactive sputtering using Ne, Ar, Kr, or Xe gases10.1143/JJAP.43.L358 ↗
16. Crystallinity and photocatalytic activity of TiO2 films deposited by reactive sputtering with radio frequency substrate bias10.1016/j.tsf.2005.08.249 ↗
17. Thin film TiO2 photocatalyst deposited by reactive magnetron sputtering10.1016/S0040-6090(03)00987-8 ↗
18. Nucleation and growth in TiO2 films prepared by sputtering and evaporation10.1016/0040-6090(94)90843-5 ↗
19. dc reactive magnetron sputtering of titanium structural and optical characterization of TiO2 films10.1063/1.351264 ↗
20. Features of and IN SITU measurements on absorbing TiOx films produced by reactive d.c. magnetron–plasmatron sputtering10.1016/0040-6090(80)90534-9 ↗
21. Preparation of anatase and rutile thin films by controlling oxygen partial pressure10.1016/S0169-4332(02)00532-9 ↗
22. Ambient temperature growth of nanocrystalline titanium dioxide thin films10.1016/j.ssc.2005.04.003 ↗
23. Influence of deposition parameters on the optical and structural properties of TiO2 films produced by reactive d.c. plasmatron sputtering10.1016/0040-6090(81)90673-8 ↗
24. The effect of substrate temperature on the properties of d.c. reactive magnetron sputtered titanium oxide films10.1016/0040-6090(93)90528-W ↗
25. Influence of argon flow rate on TiO2 photocatalyst film deposited by dc reactive magnetron sputtering10.1016/j.surfcoat.2003.08.050 ↗
26. UV raman spectroscopic study on TiO2. I. Phase transformation at the surface and in the bulk10.1021/jp0552473 ↗
27. Preparation of a highly thermally stable titania anatase phase by addition of mixed zirconia and silica dopants10.1016/j.ceramint.2005.02.009 ↗
28. Effect of the substrate temperature on the crystallization of TiO2 films prepared by DC reactive magnetron sputtering10.1016/j.jcrysgro.2007.01.008 ↗
29. Taguchi · 1989
30. Park · 1996
31. Applying the Taguchi method to the optimization for the synthesis of TiO2 nanoparticles by hydrolysis of TEOT in micelles10.1016/j.colsurfa.2004.11.033 ↗
32. Optimizing preparation of the TiO2 thin film reactor using the Taguchi method10.1016/j.matdes.2009.07.055 ↗
33. Decolorization of methylene blue in aqueous suspensions of titanium peroxide10.1016/j.jhazmat.2007.08.090 ↗