journal article·2026-03

Enhancement of mechanical properties and reliability of SiC ceramics by depositing a pre-stressed SiC coating

Dengke Feng, Zehua Liu, Xishi Wu, Bingbing Pei, Jianshen Han, Huan Liu, Yitian Yang, Haibo Wu, Zhengren Huang

Ceramics International· Volume 52· Issue 7
Publisher page

Abstract

No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.

Source: Not provided · Quality: missing

Research context

OpenAlex topics: Advanced ceramic materials synthesis · Metal and Thin Film Mechanics · Silicon Carbide Semiconductor Technologies

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References (67)

Show source-provided references
1. Novel direct and wide bandgap SiC semiconductors: high-throughput screening and density functional theory10.1016/j.rinp.2024.107966 ↗
2. A DFT study on the surface reaction mechanisms on 4H-SiC surfaces with gaseous species from the MTS-H2 gas-phase system10.1039/D4NJ05268D ↗
3. The processing chain of the wide bandgap semiconductor SiC – how small steps enabled a mature technology
4. An application of Lotka–Volterra model to Taiwan's transition from 200mm to 300mm silicon wafers10.1016/j.techfore.2011.05.007 ↗
5. Growth of 450mm diameter semiconductor grade silicon crystals10.1016/j.jcrysgro.2010.10.122 ↗
6. Study on the mechanism of second phase formation in high-purity fused silica materials for semiconductor application10.1016/j.jnoncrysol.2024.122990 ↗
7. Improvement of the bonding strength and the oxidation resistance of SiC coating on C/C composites by pre-oxidation treatment10.1016/j.surfcoat.2014.05.042 ↗
8. Interfacial modification and oxidation resistance behavior of a CVD-SiC coating for C/SiC composites10.1016/j.ceramint.2023.09.011 ↗
9. Effect of SiC nanowires on the mechanical and oxidation protective ability of SiC coating for C/C composites10.1111/j.1551-2916.2011.04979.x ↗
10. A carbon nanotube–enhanced SiC coating for the oxidation protection of C/C composite materials10.1016/j.compositesb.2011.05.012 ↗
11. Densification of additive-free polycrystalline β-SiC by spark-plasma sintering10.1016/j.ceramint.2011.06.036 ↗
12. Densification behavior of high purity SiC by hot pressing10.1016/j.ceramint.2014.07.143 ↗
13. Temperature dependence of flexural strength and residual stress of Al2O3 reinforced by kyanite coating10.1016/j.ceramint.2022.06.190 ↗
14. Influence of radio frequency magnetron sputtering parameters on the structure and performance of SiC films10.1016/j.ceramint.2021.05.120 ↗
15. Microstructure, electrical, thermal, and permeability properties of recrystallised SiC: effects of sub-micron-sized SiC and sintering temperature10.1016/j.ceramint.2025.03.195 ↗
16. A new design for preparation of high performance recrystallized silicon carbide10.1016/j.ceramint.2011.11.016 ↗
17. Effect of removal of silicon on preparation of porous SiC ceramics following reaction bonding and recrystallization10.1016/j.msea.2012.04.071 ↗
18. Effects of initial α‐phase content on properties of pressureless solid‐state sintered SiC ceramics10.1111/ijac.13892 ↗
19. Novel process for recrystallized silicon carbide through β-α phase transformation10.1016/j.ceramint.2020.04.106 ↗
20. Porous SiC ceramics fabricated by quick freeze casting and solid state sintering10.1016/j.pnsc.2017.04.006 ↗
21. Effects of boron source on properties of pressureless solid-state sintered silicon carbide ceramics10.1016/j.jeurceramsoc.2023.10.043 ↗
22. HfB2-SiC ceramics fabricated by reactive melt infiltration and its long-term oxidation behavior at 1650°C10.1016/j.jeurceramsoc.2024.117074 ↗
23. In situ observation of mechanical damage within a SiC-SiC ceramic matrix composite10.1016/j.jnucmat.2016.09.007 ↗
24. Oxidation behavior of different La2O3-content modified SiC ceramic at 1700 °C10.1016/j.ceramint.2020.12.286 ↗
25. Effect of carbon content on electrical, thermal, and mechanical properties of porous SiC ceramics with B4C and C additives10.1016/j.jeurceramsoc.2022.04.004 ↗
26. Densification and enhancement of SiC particulate‐reinforced fine‐grain SiC ceramic10.1111/ijac.14112 ↗
27. Preparation of dense and high-purity SiC ceramics by pressureless solid-state-sintering10.1016/j.ceramint.2019.06.231 ↗
28. Microstructure and mechanical properties of hot-pressed SiC nanofiber reinforced SiC composites10.1016/j.ceramint.2022.02.070 ↗
29. Dual toughening mechanisms via PyC/BN interphases and SiC whiskers in CCf/SiC composites fabricated by NITE process
30. Fabrication and properties of SiCnw‐reinforced SiC composites by reactive melt infiltration with BN and PyC interface10.1111/ijac.14149 ↗
31. Grain size and grain boundary characteristics on the out-plane thermal conductivity of <111>-oriented CVD 3C–SiC10.1016/j.ceramint.2024.04.101 ↗
32. Polycrystalline 3C-SiC thin films deposited by dual precursor LPCVD for MEMS applications10.1016/j.sna.2004.09.009 ↗
33. Effects of deposition temperature on microstructures and ablative properties of SiC coatings prepared by CVD from methylsilane10.1016/S1003-6326(23)66371-X ↗
34. High-throughput thermodynamic analysis of the CVD of SiC from the SiCl4-CH4-H2 system10.1016/j.surfcoat.2023.129741 ↗
35. Roughness evolution during chemical vapor deposition10.1016/j.matchemphys.2008.06.008 ↗
36. Comparison of the oxidation behaviors of SiC coatings on C/C composites prepared by pack cementation and chemical vapor deposition10.1016/j.surfcoat.2016.05.071 ↗
37. Effects of deposition temperature on microstructure and electrical resistivity of intrinsic CVD-SiC
38. Experimental phase diagram of SiC in CH3SiCl3–Ar–H2 system produced by fluidized bed chemical vapor deposition and its nuclear applications10.1557/jmr.2016.274 ↗
39. Effects of working pressure and substrate temperature on the structure and mechanical properties of nanocrystalline SiC thin films deposited by bias-enhanced hot filament chemical vapor deposition10.1016/j.tsf.2014.03.024 ↗
40. Kinetics of chemical vapor deposition of SiC from methyltrichlorosilane and hydrogen10.1016/j.apsusc.2009.03.069 ↗
41. Effects of residence time and reaction conditions on the deposition of SiC from methyltrichlorosilane and hydrogen10.1111/j.1744-7402.2011.02653.x ↗
42. CFD simulation of CVD reactors in the CH(3)SiCl(3)(MTS)/H(2) system using a two-step MTS decomposition and one-step SiC growth models10.1016/j.heliyon.2023.e15061 ↗
43. Computational thermodynamic study of SiC chemical vapor deposition from MTS‐H210.1111/jace.17742 ↗
44. Effect of free carbon on micro-mechanical properties of a chemically vapor deposited SiC coating10.1016/j.ceramint.2018.06.165 ↗
45. Growth and defect formation mechanism of CVD-prepared SiC coatings based on cross-scale simulation
46. High thermal conductivity in pressureless densified SiC ceramics with ultra-low contents of additives derived from novel boron–carbon sources10.1016/j.jeurceramsoc.2014.02.024 ↗
47. Microstructure evolutions of SiC whiskers at high temperature and its effects on silicon carbide ceramics10.1016/j.ceramint.2023.06.169 ↗
48. Liquid phase sintering and characterization of SiC ceramics10.1016/j.ceramint.2018.03.083 ↗
49. Fabrication and mechanical properties of large‐scale SiC impeller via vacuum gelcasting and pressureless sintering10.1111/ijac.13510 ↗
50. A simple way to make pre-stressed ceramics with high strength10.1016/j.jmat.2019.06.001 ↗
51. Measurement of residual stress in silicon carbide fibers of tubular composites using raman spectroscopy10.1016/j.actamat.2021.117164 ↗
52. Temperature dependence of residual tensile stresses and its influences on crack propagation behaviour
53. Effects of residual stresses on strength and crack resistance in ZrO2 ceramics with alumina coating
54. Temperature-dependent residual stress and thermal stability studies of multilayer HF-CVD diamond coatings on RB-SiC10.1016/j.surfcoat.2022.128552 ↗
55. CVD synthesis of nanometer SiC coating on diamond particles10.1016/j.ceramint.2021.02.192 ↗
56. Residual stress measurements in melt infiltrated SiC/SiC ceramic matrix composites using Raman spectroscopy10.1016/j.jeurceramsoc.2018.02.013 ↗
57. Effect of CH4/SiCl4 ratio on the composition and microstructure of ⟨110⟩-oriented β-SiC bulks by halide CVD10.1016/j.jeurceramsoc.2016.11.015 ↗
58. Effect of microstructure on impact resistance of chemical vapor deposited SiC coating on graphite substrate
59. Residual stress analysis in high‐speed physical vapor deposition coatings10.1002/adem.202401095 ↗
60. Residual thermal stresses prediction for CVD coating/substrate system based on a numerical model10.1111/ijac.13023 ↗
61. Evaluating thermal expansion coefficient and density of ceramic coatings by relative method10.1016/j.matlet.2015.09.034 ↗
62. Effect of sintering temperature on density and mechanical properties of solid-state sintered silicon carbide ceramics and evaluation of failure origin10.1007/s11665-018-3397-4 ↗
63. On the reliability of weibull statistical analysis for fracture strength of ceramics
64. High toughness and R-curve behaviour of laminated SiC/graphite ceramics10.1016/j.ceramint.2020.06.072 ↗
65. Improved fracture resistance and toughening mechanisms of GNPs reinforced ceramic composites10.1016/j.ceramint.2022.05.115 ↗
66. Fracture of ceramics10.1002/adem.200700347 ↗
67. Mechanical behavior of SiC ceramics with single flaw under three-point bending10.1016/j.ceramint.2021.03.194 ↗