Exploring the impact of metal ion implantation on the surface evolution of TiN thin films
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OpenAlex topics: Metal and Thin Film Mechanics · Semiconductor materials and devices · Copper Interconnects and Reliability
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References (62)
Show source-provided references
1. Highly ordered TiN nanotube arrays as counter electrodes for dye-sensitized solar cells10.1039/b912776c ↗
2. Material selection for hard coatings10.1116/1.573700 ↗
3. Microstructural evolution of titanium nitride (TiN) coatings produced by reactive ion beam-assisted, electron beam physical vapor deposition (RIBA, EB-PVD)10.1023/A:1004668325924 ↗
4. Wear resistance investigation of titanium nitride-based coatings10.1016/j.ceramint.2015.04.152 ↗
5. Titanium nitride membrane application to extended gate field effect transistor pH sensor using VLSI technology10.1143/JJAP.40.6311 ↗
6. Corrosion mechanism in PVD deposited nano-scale titanium nitride thin film with intercalated titanium for protecting the surface of silicon10.1016/j.electacta.2018.01.042 ↗
7. Epitaxial titanium nitride microwave resonators: structural, chemical, electrical, and microwave properties
8. Ultrafine titanium nitride sheath decorated carbon nanofiber network enabling stable lithium metal anodes10.1002/adfm.201903229 ↗
9. High aspect ratio titanium nitride trench structures as plasmonic biosensor10.1364/OME.7.004171 ↗
10. Label-free surface plasmon resonance biosensing with titanium nitride thin film10.1016/j.bios.2018.02.006 ↗
11. Detection of glioma-derived exosomes with the biotinylated antibody-functionalized titanium nitride plasmonic biosensor
12. Nanostructured titanium nitride for highly sensitive localized surface plasmon resonance biosensing10.1016/j.ceramint.2020.05.163 ↗
13. Surface-enhanced Raman scattering substrates of flat and wrinkly titanium nitride thin films by sputter deposition10.1016/j.surfcoat.2018.01.048 ↗
14. Photoluminescence control by hyperbolic metamaterials and metasurfaces: a review10.29026/oea.2021.210031 ↗
15. Investigation of the electronic structure of an iron-titanium nitride ammonia synthesis catalyst10.1016/0169-4332(86)90024-3 ↗
16. Co-decorated reduced graphene/titanium nitride composite as an active oxygen reduction reaction catalyst with superior stability10.1002/er.5791 ↗
17. Structural evolution of TiN catalysts during mechanocatalytic ammonia synthesis10.1039/D2FD00164K ↗
18. Recent progress in the synthesis of transition metal nitride catalysts and their applications in electrocatalysis10.1039/D3NR01607B ↗
19. Chemical modification of titanium nitride films via ion implantation10.2320/matertrans.44.1962 ↗
20. On high dose nitrogen implantation of PVD titanium nitride10.1016/j.surfcoat.2005.09.010 ↗
21. Studies on the surface modification of TiN coatings using MEVVA ion implantation with selected metallic species10.1016/j.nimb.2015.11.038 ↗
22. Study of the microstructure and tribological properties of Mo + C-implanted TiN coatings on cemented carbide substrates10.1016/j.surfcoat.2011.11.038 ↗
23. The microstructure, mechanical and tribological properties of TiN coatings after Nb and C ion implantation10.1016/j.apsusc.2013.07.112 ↗
24. Microstructural and mechanical properties of Si-ion implanted TiN coatings10.1016/j.surfcoat.2012.05.119 ↗
25. Carbon ion irradiation effects on pulsed laser deposited titanium nitride thin films
26. Investigations on mechanical and electrical properties of N+ ions implanted TiN thin films10.1088/2053-1591/aa680b ↗
27. The effects of MEVVA ion implantation on the tribological properties of PVD–TiN films deposited on steel substrates10.1016/S0257-8972(02)00131-7 ↗
28. Surface properties and microstructure of implanted TiN films using MEVVA ion source10.1016/j.msea.2006.09.073 ↗
29. Low-loss and tunable near-zero-epsilon titanium nitride10.1016/j.optmat.2017.07.035 ↗
30. Low optical losses in plasmonic TiN thin films implanted with silver and gold10.1016/j.optmat.2021.111936 ↗
31. Enhancement of photocatalytic activity by thermal annealing of Au, Ag, and Cu implanted TiN thin films10.1016/j.ceramint.2024.08.451 ↗
32. Ziegler
33. Mayer · 1997
34. www.simnra.com.
35. Structure-dependent optical properties of Au/Ag irradiated TiN thin films10.1016/j.optmat.2023.113684 ↗
36. Ion beam synthesis of Au-Ag alloy nanoparticles in TiN thin films10.1016/j.nimb.2020.04.032 ↗
37. Synthesis of AuAg@Ag core/shell bimetallic nanoparticles in titanium nitride thin films by sequential ion implantation10.1016/j.apsusc.2019.03.243 ↗
38. Investigating on the microstructure and optical properties of Au, Ag and Cu implanted TiN thin films: the effects of surface oxidation and ion-induced defects10.1016/j.jallcom.2023.173046 ↗
39. Quantitative chemical state XPS analysis of first row transition metals, oxides and hydroxides
40. Resolving surface chemical states in XPS analysis of first row transition metals, oxides and hydroxides: Sc, Ti, V, Cu and Zn10.1016/j.apsusc.2010.07.086 ↗
41. Study of nitrogen implantation in Ti surface using plasma immersion ion implantation & deposition technique as biocompatible substrate for artificial membranes10.1016/j.msec.2020.111002 ↗
42. Surface characterisation of plasma nitrided titanium: an XPS study10.1016/0169-4332(94)00545-1 ↗
43. Resolving surface chemical states in XPS analysis of first row transition metals, oxides and hydroxides: Cr, Mn, Fe, Co and Ni10.1016/j.apsusc.2010.10.051 ↗
44. A complete and self-consistent evaluation of XPS spectra of TiN10.1016/j.elspec.2012.10.011 ↗
45. Synthesis of high-performance titanium sub-oxides for electrochemical applications using combination of sol-gel and vacuum-carbothermic processes10.1021/acssuschemeng.7b03189 ↗
46. Corrosion resistance of single TiN layers, Ti/TiN bilayers and Ti/TiN/Ti/TiN multilayers on iron under a salt fog spray (phohesion) test: an evaluation by XPS10.1002/(SICI)1096-9918(199902)27:2<71::AID-SIA469>3.0.CO;2-G ↗
47. Self-consistent modelling of X-ray photoelectron spectra from air-exposed polycrystalline TiN thin films10.1016/j.apsusc.2016.06.012 ↗
48. Naumkin · 2012
49. XPS analysis of nanostructured materials and biological surfaces10.1016/j.elspec.2009.09.003 ↗
50. XPS intensities and binding energy shifts as metal dispersion parameters in Ni/SiO2 catalysts10.1002/sia.740160179 ↗
51. Calculation of overlayer thickness on curved surfaces based on XPS intensities10.1002/sia.1769 ↗
52. Wagner · 2003
53. Surface oxidation and reduction of CuO and Cu2O studied using XPS and XAES10.1002/(SICI)1096-9918(199611)24:12<811::AID-SIA191>3.0.CO;2-Z ↗
54. A chemical, morphological, and electrochemical (XPS, SEM/EDX, CV, and EIS) analysis of electrochemically modified electrode surfaces of natural chalcopyrite (CuFeS2) and pyrite (FeS2) in alkaline solutions10.1021/jp048273u ↗
55. Surface roughness prediction technique for CNC end-milling
56. Structural, optical, and magnetic properties of Ag+, Mn+ and Ar+ ions implanted ZnO thin films: effect of implantation dose and stopping energy10.1039/D2RA05430B ↗
57. Xenon-ion irradiation of Co/Si bilayers: magnetic and structural properties10.1016/j.apsusc.2018.03.215 ↗
58. Microstructure and tribological properties of W-implanted PVD TiN coatings on 316L stainless steel10.1016/j.vacuum.2013.04.019 ↗
59. Improvement in wear resistance of C+ ion implanted DC magnetron sputtered TiC film10.1016/j.triboint.2016.08.033 ↗
60. Effect of implantation of Sm+ ions into RF sputtered ZnO thin film10.1063/1.5093586 ↗
61. Ion implantation and beam processing10.1080/713821765 ↗
62. Effect of low-energy nitrogen ion implantation on friction and wear properties of ion-plated TiC coating10.3390/coatings11070775 ↗