journal article·2025-09

Effects of implementing nitrogen-first-oxygen-next (NFON) approach for post-deposition annealing of high dielectric constant terbium oxide films

Songhua Zhang, Kuan Yew Cheong, Way Foong Lim

Ceramics International· Volume 51· Issue 21
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OpenAlex topics: Semiconductor materials and devices · Electronic and Structural Properties of Oxides · Ferroelectric and Piezoelectric Materials

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