journal article·2025-11

Effect of working pressure on the microstructure and mechanical behavior of (AlCrTaTiZr)N high-entropy nitride films

Wenhao Liang, Mingyou Niu, Xuanpu Zhang, Shangkun Shen, Ruifeng Han, Jianbo Wang, Peipei Wang, Jin Li, Engang Fu

Ceramics International· Volume 51· Issue 28
Publisher page

Abstract

No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.

Source: Not provided · Quality: missing

Research context

OpenAlex topics: Metal and Thin Film Mechanics · Advanced ceramic materials synthesis · Boron and Carbon Nanomaterials Research

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References (74)

Show source-provided references
1. High-performance coatings for cutting tools10.1016/j.cirpj.2016.11.004 ↗
2. An investigation of the electrochemical properties of PVD TiN-coated SS410 in simulated PEM fuel cell environments10.1016/j.ijhydene.2007.02.006 ↗
3. A comparative study of CrNx coatings Synthesized by dc and pulsed dc magnetron sputtering10.1016/j.tsf.2008.09.093 ↗
4. Electronic properties of binary and ternary, hard and refractory transition metal nitrides10.1016/j.surfcoat.2009.10.046 ↗
5. Gas nitriding behavior of refractory metals and implications for multi-principal element alloy design10.1016/j.jallcom.2023.169568 ↗
6. Titanium aluminum nitride films: a new alternative to TiN coatings10.1116/1.573713 ↗
7. Tribological properties and deformation mechanism of TiAlN coating sliding with various counterbodies10.1016/j.triboint.2013.05.001 ↗
8. Origin of high temperature oxidation resistance of Ti–Al–Ta–N coatings10.1016/j.surfcoat.2014.02.067 ↗
9. Increased thermal stability of Ti–Al–N thin films by Ta alloying10.1016/j.surfcoat.2011.07.009 ↗
10. Improved Ti-Al-N coatings through Ta alloying and multilayer architecture10.1016/j.surfcoat.2017.09.016 ↗
11. Nanostructured high‐entropy alloys with multiple principal elements: novel alloy design concepts and outcomes10.1002/adem.200300567 ↗
12. Microstructural development in equiatomic multicomponent alloys10.1016/j.msea.2003.10.257 ↗
13. Metastable high-entropy dual-phase alloys overcome the strength–ductility trade-off10.1038/nature17981 ↗
14. Nanocrystalline high-entropy alloys: a new paradigm in high-temperature strength and stability10.1021/acs.nanolett.6b04716 ↗
15. The design of Pd-containing high-entropy alloys and their hardening behavior under He ion irradiation10.1016/j.actamat.2023.119404 ↗
16. Influence of N content on structure and mechanical properties of multi-component Al-Cr-Nb-Y-Zr based thin films by reactive magnetron sputtering10.1016/j.surfcoat.2020.125614 ↗
17. Structure and properties of super-hard (MoSiTiVZr)N high-entropy nitride coatings regulated by substrate bias10.1016/j.surfcoat.2025.131788 ↗
18. Microstructure, mechanical properties and lead-bismuth eutectic corrosion behavior of (AlCrFeTiMo)NO and (AlCrFeTiNb)NO high entropy metal sublattice ceramic coatings10.1016/j.vacuum.2022.111774 ↗
19. Diffusion barrier with 30-fold improved performance using AlCrTaTiZrN high-entropy alloy10.1016/j.jallcom.2019.151755 ↗
20. Growth mechanisms and the effects of deposition parameters on the structure and properties of high entropy film by magnetron sputtering10.3390/ma12183008 ↗
21. Preparation and characterization of AlCrTaTiZr multi-element nitride coatings10.1016/j.surfcoat.2006.06.048 ↗
22. Influence of substrate temperature on structure and mechanical, properties of multi-element (AlCrTaTiZr)N coatings10.1016/j.surfcoat.2007.01.001 ↗
23. Mechanical and tribological properties of multi-element (AlCrTaTiZr)N coatings10.1016/j.surfcoat.2008.01.014 ↗
24. AlCrTaTiZr-based high entropy alloy nitride coatings on stainless steel substrates: characterization and microscale tension testing10.1016/j.surfcoat.2024.131141 ↗
25. High thermal stability of AlCrTaTiZr nitride film as diffusion barrier for copper metallization10.1016/j.tsf.2009.03.078 ↗
26. Summary Abstract: theory of thin-film orientation by ion bombardment during deposition10.1116/1.574498 ↗
27. Wide variation in the structure and physical properties of reactively sputtered (TiZrHf)N coatings under different working pressures10.1016/j.jallcom.2018.04.011 ↗
28. Structural and mechanical properties of AlCoCrNi high entropy nitride films: influence of process pressure10.3390/coatings10010010 ↗
29. The pressure dependence of structure and composition of sputtered AlCrSiTiMoO high entropy thin film10.1016/j.jallcom.2020.156421 ↗
30. High entropy alloy thin films of AlCoCrCu0.5FeNi with controlled microstructure10.1016/j.apsusc.2019.143560 ↗
31. Stress gradients in titanium nitride thin films10.1016/j.surfcoat.2008.05.005 ↗
32. Annealing of intrinsic stresses in sputtered TiN films: the role of thickness-dependent gradients of point defect density10.1016/j.surfcoat.2006.10.017 ↗
33. Stress and strain in titanium nitride thin films10.1016/j.tsf.2009.04.020 ↗
34. Resolving hydrogen atoms at metal-metal hydride interfaces10.1126/sciadv.aay4312 ↗
35. Nanoindentation of coatings10.1088/0022-3727/38/24/R01 ↗
36. Residual stress measurement in textured thin film by grazing-incidence X-ray diffraction10.1016/S0040-6090(02)00680-6 ↗
37. Film thickness effect on texture and residual stress sign transition in sputtered TiN thin films10.1016/j.ceramint.2017.06.050 ↗
38. Residual stress measurement on TiN thin films by combing nanoindentation and average X-ray strain (AXS) method10.1016/j.surfcoat.2015.08.059 ↗
39. High-precision determination of residual stress of polycrystalline coatings using optimised XRD-sin2ψ technique10.1016/j.surfcoat.2010.07.108 ↗
40. Pressure effects in planar magnetron sputter deposition10.1116/1.573892 ↗
41. Pressure effect on YBa2Cu3O7 thin film growth in off-axis radio frequency magnetron sputtering10.1116/1.579482 ↗
42. Comparison of the structural properties and residual stress of AlN films deposited by dc magnetron sputtering and high power impulse magnetron sputtering at different working pressures10.1016/j.tsf.2013.11.073 ↗
43. Magnetron sputter deposition as visualized by Monte Carlo modeling10.1016/j.tsf.2012.06.032 ↗
44. Sputter processing
45. Sputtering in a glow discharge ion source-pressure dependence: theory and experiment10.1088/0022-3727/27/11/017 ↗
46. Morphology and properties of sputtered (Ti,Al)N layers on high speed steel substrates as a function of deposition temperature and sputtering atmosphere10.1116/1.573709 ↗
47. Deposition of multicomponent metallic glass films by single-target magnetron sputtering10.1016/j.intermet.2011.10.007 ↗
48. Preparation of WMoCrNiTi high-entropy alloy coating by plasma diffusion on titanium alloy surface10.1016/j.jallcom.2025.180744 ↗
49. Study on adhesion and wear resistance of multi-element (AlCrTaTiZr)N coatings10.1016/j.tsf.2009.03.139 ↗
50. Reactive-sputter-deposited TiN films on glass substrates10.1016/0040-6090(91)90225-M ↗
51. CrN thin films deposited by HiPIMS in DOMS mode10.1016/j.surfcoat.2016.02.064 ↗
52. Polycrystalline TiN films deposited by reactive bias magnetron sputtering: effects of ion bombardment on resputtering rates, film composition, and microstructure10.1116/1.578074 ↗
53. Structure and properties of TiN coatings10.1016/0040-6090(85)90333-5 ↗
54. Formation of polyhedral N2 bubbles during reactive sputter deposition of epitaxial TiN(100) films10.1063/1.343570 ↗
55. Effect of substrate bias on the microstructure and mechanical and tribological properties of ZrNbTiMo refractory high entropy alloy film10.1016/j.surfcoat.2022.129214 ↗
56. High-entropy ceramics10.1038/s41578-019-0170-8 ↗
57. The influence of nitrogen content on the microstructure and properties of W-Ta-Cr-V-N refractory high-entropy nitrides10.1016/j.surfcoat.2024.131475 ↗
58. Effect of silicon contents on mechanical properties and tribological behavior of (AlCrNbTiMoSix)N multicomponent nitride coatings fabricated by radio-frequency magnetron co-sputtering10.1016/j.surfcoat.2024.130793 ↗
59. Structure and characteristics of reactive magnetron sputtered (CrTaTiVZr)N coatings10.1016/j.mssp.2015.04.045 ↗
60. Influence of sputtering parameters on structures and residual stress of AlN films deposited by DC reactive magnetron sputtering at room temperature10.1016/j.jcrysgro.2012.10.008 ↗
61. Effect of geometric position on the film properties for a complex-shaped substrate in HiPIMS discharge: experiment and simulation10.1016/j.surfcoat.2022.128196 ↗
62. Fundamental structure forming phenomena of polycrystalline films and the structure zone models10.1016/S0040-6090(97)00503-8 ↗
63. Improvement of the mechanical and the tribological properties of CrNbTiMoZr coatings through the incorporation of carbon and the adjustment of the substrate bias voltage10.1016/j.surfcoat.2021.127064 ↗
64. High rate thick film growth10.1146/annurev.ms.07.080177.001323 ↗
65. Insight into the impact of nanovoids on the electrical and mechanical properties of nanotwinned copper films10.1016/j.scriptamat.2017.04.025 ↗
66. Nano dual-phase CuNiTiNbCr high entropy alloy films produced by high-power pulsed magnetron sputtering10.1016/j.surfcoat.2021.127325 ↗
67. 1996
68. Composition mapping in InGaN by scanning transmission electron microscopy10.1016/j.ultramic.2011.04.009 ↗
69. Influence of oxygen and nitrogen flow ratios on the microstructure evolution in AlCrTaTiZr high-entropy oxynitride films10.3390/coatings14091199 ↗
70. Mechanical properties, deformation behaviors and interface adhesion of (AlCrTaTiZr)Nx multi-component coatings10.1016/j.surfcoat.2010.03.041 ↗
71. Mechanical properties of nanophase metals10.1016/0965-9773(95)00044-5 ↗
72. Observation and analysis of defect cluster production and interactions with dislocations
73. On the significance of the H/E ratio in wear control: a nanocomposite coating approach to optimised tribological behaviour10.1016/S0043-1648(00)00488-9 ↗
74. Structure–property relationships in single- and dual-phase nanocrystalline hard coatings10.1016/S0257-8972(03)00576-0 ↗