Publication guidelines for patterning tools
Source abstract
Abstract
The Journal of Micro/Nanopatterning, Materials, and Metrology (JM3) publishes peer-reviewed papers on the core enabling technologies that address the patterning needs of the electronics industry.
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Source: openalex_inverted_index · Quality: needs review · Source record ↗
Source flags: short_text
Source flags: short_text
Research context
OpenAlex topics: Nanofabrication and Lithography Techniques · Optical Coatings and Gratings · Advanced Surface Polishing Techniques
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References
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