Multi-scale adaptive attention network with SE-enhanced ResNet34 for lithography hotspot detection
Bibliographic record
Abstract
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Research context
OpenAlex topics: Advancements in Photolithography Techniques · Image Processing Techniques and Applications · Industrial Vision Systems and Defect Detection
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Affiliations
Anhui University of Science and Technology, School of Computer Science and Engineering, Huainan, China
Anhui University of Science and Technology, School of Mathematics and Big Data, Huainan, China
Hefei University of Technology, School of Microelectronics, Hefei, China
Funding
National Natural Science Foundation of China
References
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