Deposition of boron coatings on surfaces by electron-beam evaporation in forevacuum
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OpenAlex topics: Ion-surface interactions and analysis · Metal and Thin Film Mechanics · Nuclear Materials and Properties
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References (19)
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14. Electron-beam deposition of heat-conducting ceramic coatings in the forevacuum pressure range10.1016/j.ceramint.2020.05.197 ↗
15. An experimental test-stand for investigation of electron-beam synthesis of dielectric coatings in medium vacuum pressure range10.1016/j.vacuum.2019.02.010 ↗
16. Deposition of dielectric films on silicon using a fore-vacuum plasma electron source10.1063/1.4953112 ↗
17. Electron-beam heating of ceramics to moderate temperature at fore-vacuum pressure10.1016/j.radphyschem.2022.110169 ↗
18. Ion composition of the beam plasma generated by electron-beam evaporation of metals and ceramic in the forevacuum range of pressure10.3390/catal12050574 ↗
19. 2002