journal article·2022-01-20Open access

Reflections on the Journal of Micro/Nanopatterning, Materials, and Metrology’s First Year

Harry J. Levinson

Abstract

The Journal of Micro/Nanopatterning, Materials, and Metrology (JM3) publishes peer-reviewed papers on the core enabling technologies that address the patterning needs of the electronics industry.
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Research context

OpenAlex topics: Nanofabrication and Lithography Techniques

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References

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