Study of critical dimension small-angle X-ray scattering within-spot uniformity with mass critical dimension scanning electron microscope and 3D tomography
Bibliographic record
Abstract
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Research context
OpenAlex topics: Advanced X-ray Imaging Techniques · Crystallography and Radiation Phenomena · X-ray Diffraction in Crystallography
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Affiliations
Lam Research Korea Technology Center, Yongin-si, Republic of Korea
Lam Research Corporation, Fremont, California, United States
References
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