Constitutive diffusion model for precise critical dimension patterning via beam shape optimization and effects on uniformity
Bibliographic record
Abstract
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Research context
OpenAlex topics: Advanced Mathematical Modeling in Engineering · Nonlocal and gradient elasticity in micro/nano structures · Solidification and crystal growth phenomena
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Affiliations
University of California, Department of Mechanical Engineering, Berkeley, California, United States
Funding
UC Berkeley College of Engineering
References
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