journal article·2024-11

Fabricating highly stable and reliable vanadium dioxide thin films: Insights from radio frequency magnetron sputtering

Mayank Dotiyal, Manoj Singh, Rupak Banerjee, Emila Panda

Ceramics International· Volume 50· Issue 22
Publisher page

Abstract

No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.

Source: Not provided · Quality: missing

Research context

OpenAlex topics: Transition Metal Oxide Nanomaterials · Gas Sensing Nanomaterials and Sensors · Ga2O3 and related materials

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References (69)

Show source-provided references
1. Emerging electrochromic materials and devices for future displays10.1021/acs.chemrev.1c01055 ↗
2. VO2-based switchable radiator for spacecraft thermal control
3. Thermochromic VO2 film deposited on Al with tunable thermal emissivity for space applications10.1016/j.solmat.2011.08.014 ↗
4. VO2-based intelligent thermal control coating for spacecraft by regulating infrared emittance10.1016/j.jallcom.2021.162679 ↗
5. Thermochromic VO2 for energy-efficient smart windows10.1016/j.joule.2018.06.018 ↗
6. High performance VO2 thin films growth by DC magnetron sputtering at low temperature for smart energy efficient window application10.1016/j.jallcom.2015.11.047 ↗
7. Optimum oxygen concentration for the optoelectronic properties of IR sensitive VOx thin films10.1016/S0925-3467(01)00053-2 ↗
8. Work function of vanadium dioxide thin films across the metal-insulator transition and the role of surface nonstoichiometry10.1021/am2006299 ↗
9. Control of the metal–insulator transition in vanadium dioxide by modifying orbital occupancy10.1038/nphys2733 ↗
10. Controlling metal-insulator transitions in vanadium oxide thin films by modifying oxygen stoichiometry10.1021/acsami.0c18327 ↗
11. Unraveling structural phase transformation by simultaneously determining the lattice constants and mismatch angle in VO2/Al2O3 epitaxial thin films
12. Surface metal-insulator transition on a vanadium pentoxide (001) single crystal10.1103/PhysRevLett.99.226103 ↗
13. Synthesis of vanadium dioxide thin films and nanostructures10.1063/5.0027690 ↗
14. Phase changeable vanadium dioxide (VO2) thin films grown from vanadium pentoxide (V2O5) using femtosecond pulsed laser deposition10.1063/5.0010157 ↗
15. Facile fabrication of composite vanadium oxide thin films with enhanced thermochromic properties10.1021/acsami.9b11376 ↗
16. Critical evaluation and thermodynamic optimization of the VO-VO2.5 system10.1016/j.jeurceramsoc.2012.04.045 ↗
17. Thermochromatic vanadium dioxide (VO2) thin films synthesized by atomic layer deposition and post-treatments10.1016/j.apsusc.2020.147108 ↗
18. Epitaxial grown VO2 with suppressed hysteresis and low room temperature resistivity for high-performance thermal sensor applications10.1021/acsanm.2c05297 ↗
19. Effect of process parameters on phase stability and metal-insulator transition of vanadium dioxide (VO2) thin films by pulsed laser deposition10.1016/j.actamat.2017.07.025 ↗
20. Strain effects in epitaxial VO2 thin films on columnar buffer-layer TiO2/Al2O3 virtual substrates10.1021/acsami.6b13112 ↗
21. Control of structural and electrical transitions of VO2 thin films10.1021/acsami.7b05620 ↗
22. VO2 thin films fabricated by reduction of thermal evaporated V2O5 under N2 flow10.1016/j.matlet.2021.130086 ↗
23. Preparation and properties of VO2 thin films by a novel sol–gel process10.1007/s10971-013-3220-5 ↗
24. Malarde
25. VO2 film with small hysteresis width and low transition temperature10.1016/j.vacuum.2019.108971 ↗
26. A highly-efficient approach for reducing phase transition temperature of VO2 polycrystalline thin films through Ru4+-doping10.1016/j.jallcom.2019.03.214 ↗
27. High quality thermochromic VO2 films prepared by magnetron sputtering using V2O5 target with in situ annealing10.1016/j.apsusc.2019.07.178 ↗
28. Structural, electrical and optical properties of sputtered vanadium pentoxide thin films10.1016/0040-6090(95)06617-9 ↗
29. Thermochromic properties of vanadium oxide thin films prepared by reactive magnetron sputtering at different oxygen concentrations10.1016/j.vacuum.2023.111887 ↗
30. Flexible VO2/Mica thin films with excellent phase transition properties fabricated by RF magnetron sputtering10.1016/j.vacuum.2021.110407 ↗
31. Characterization of vanadium oxide thin films with different stoichiometry using Raman spectroscopy10.1016/j.tsf.2016.07.082 ↗
32. Preparation of thermochromic VO2 thin films on fused silica and soda-lime glass by RF magnetron sputtering10.1143/JJAP.41.312 ↗
33. Formation and thermochromism of VO2 films deposited by RF magnetron sputtering at low substrate temperature10.1143/JJAP.33.1478 ↗
34. Effect of O2 concentration on metal–insulator transition properties of vanadium oxide thin films prepared by radio frequency magnetron sputtering10.1016/j.tsf.2007.03.066 ↗
35. Growth and characterization of VO2 thin film by pulsed DC sputtering of optical switching applications10.1166/sam.2017.2937 ↗
36. VO2 thin films deposited on silicon substrates from V2O5 target: limits in optical switching properties and modeling10.1016/j.tsf.2007.04.129 ↗
37. Vanadium oxide thin films produced by magnetron sputtering from a V 2O5 target at room temperature10.1016/j.infrared.2013.03.001 ↗
38. Properties of VO2 films sputter-deposited from V2O5 target10.1143/JJAP.42.4480 ↗
39. Thermochromic VO2 films deposited by RF magnetron sputtering using V2O3 or V2O5 targets10.1143/JJAP.39.6016 ↗
40. Systematic and collaborative approach to problem solving using X-ray photoelectron spectroscopy10.1016/j.apsadv.2021.100112 ↗
41. Physical vapour deposition of vanadium dioxide for thermochromic smart window applications10.1039/C8TC05014G ↗
42. Sharp semiconductor-to-metal transition of VO2 thin films on glass substrates10.1063/1.4851655 ↗
43. Metal–insulator transition of vanadium dioxide and the role of grain boundaries10.1063/5.0149448 ↗
44. X-ray line broadening from filed aluminium and wolfram10.1016/0001-6160(53)90006-6 ↗
45. Williamson-Hall analysis in estimation of lattice strain in nanometer-sized ZnO particles10.1186/2251-7235-6-6 ↗
46. Effect of structural disorder on the modification of V–V and V–O bond lengths at the metal-dielectric phase transition in VO2 thin films10.1016/j.mssp.2024.108224 ↗
47. Suppression of metal-insulator transition in VO2 by electric field-induced oxygen vacancy formation10.1126/science.1230512 ↗
48. Postfabrication annealing effects on insulator–metal transitions in VO2 thin-film devices10.1021/am5046982 ↗
49. Evolution of structural and electrical properties of oxygen-deficient VO2 under low temperature heating process10.1021/acsami.7b05792 ↗
50. Behavior of vanadium dioxide single crystals synthesized under the various oxygen partial pressures at 1500 K10.1016/0022-4596(74)90056-5 ↗
51. Transfer of spectral weight and symmetry across the metal-insulator transition in VO210.1103/PhysRevLett.97.116402 ↗
52. X-ray photoelectron and Auger spectroscopy study of some vanadium oxides10.1103/PhysRevB.20.1546 ↗
53. Effects of charge fluctuation and charge regulation on the phase transitions in stoichiometric VO2
54. XPS studies of V2O5, V6O13, VO2 and V2O310.1016/0368-2048(94)02291-7 ↗
55. An XPS study on the surface reduction of V2O5(001) induced by Ar+ ion bombardment10.1016/j.susc.2006.07.006 ↗
56. Stoichiometric vanadium oxides studied by XPS
57. Determination of the V2p XPS binding energies for different vanadium oxidation states (V+5 to V+0)10.1016/j.elspec.2004.03.004 ↗
58. Resolving surface chemical states in XPS analysis of first row transition metals, oxides and hydroxides: Sc, Ti, V, Cu and Zn10.1016/j.apsusc.2010.07.086 ↗
59. Interpretation of oxygen 1s X-ray photoelectron spectroscopy of ZnO10.1021/acs.chemmater.3c00801 ↗
60. Hofmann · 2012
61. Quantitative analysis of solid surfaces by Auger electron spectroscopy
62. Mott transition in VO2 revealed by infrared spectroscopy and nano-imaging10.1126/science.1150124 ↗
63. Thermodynamics of native defects in V2O5 crystal: a first-principles method10.1016/j.commatsci.2023.112071 ↗
64. Size effects in the structural phase transition of VO2 nanoparticles10.1103/PhysRevB.65.224113 ↗
65. Near-zero IR transmission of VO2 thin films deposited on Si substrate10.1016/j.apsusc.2018.01.176 ↗
66. Properties of thermochromic VO2 films prepared by HiPIMS onto unbiased amorphous glass substrates at a low temperature of 300 °C10.1016/j.tsf.2018.06.057 ↗
67. Optical and electrical switching properties of VO2 thin film on MgF2 (111) substrate10.1016/j.ceramint.2016.01.178 ↗
68. Thermochromic multilayer films of VO2 and TiO2 with enhanced transmittance10.1016/j.solmat.2009.03.021 ↗
69. Fabrication of high-quality VO2 thin films by ion-assisted dual ac magnetron sputtering10.1021/am403807u ↗