journal article·2025-05-24Open access

Advances in modeling and optimization for two-photon lithography

Valeriia Sedova, Florie Ogor, Joël Rovera, Odysseas Tsilipakos, Jonas Wiedenmann, Kevin Heggarty, Andreas Erdmann

Abstract

BackgroundTwo-photon polymerization (TPP) is one of the most promising methods for the fabrication of metasurfaces due to its ability to create complex, high-resolution nanostructures. However, fabricating these structures using TPP is complex, and predicting the results of the fabrication process is challenging.AimWe aim to address these challenges by demonstrating how different modeling techniques can be employed to support the fabrication-aware design of metasurfaces.ApproachWe introduce and explore three modeling techniques: a simple threshold model, a compact model, and a full model of polymerization. Each model offers different levels of complexity and accuracy. We assess how well each model performs and what limitations they have, using practical examples to show how they can guide the fabrication process.ResultsOur comparison highlights the advantages and limitations of each modeling approach. The basic threshold model provides a general overview, focusing solely on the optical aspects and using a simple threshold for the photoresist. Thus, it lacks detailed descriptions of resist behavior. The compact model is semi-empirical, focusing on simplified chemical dynamics of a single species while including essential photochemical processes. By contrast, the full model of polymerization is the most advanced, offering a detailed description of various species involved in the process, such as monomers, polymers, and quenchers. Although it provides the most accurate predictions, it is also the most complex and computationally demanding.ConclusionsBy comparing these modeling approaches, we show that the decision on the most appropriate model depends on the specific requirements of the metasurface fabrication process. This analysis helps researchers and engineers determine the most suitable modeling approach for their work.
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Research context

OpenAlex topics: Advancements in Photolithography Techniques · Nanofabrication and Lithography Techniques · Analytical Chemistry and Sensors

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Affiliations

Fraunhofer IISB, Erlangen, Germany

IMT Atlantique, Brest, France

Theoretical and Physical Chemistry Institute, National Hellenic Research Foundation (NHRF), Athens, Greece, Institute of Electronic Structure and Laser, Foundation for Research and Technology Hellas, Heraklion, Greece

Heidelberg Instruments Mikrotechnik GmbH, Würzburg, Germany

Funding

European Union · European Union’s Horizon Europe Research and Innovation Program

References

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