Special Section Guest Editorial: Next Generation Light Source, Materials, and Metrology/Inspection Equipment
Source abstract
Abstract
The Journal of Micro/Nanopatterning, Materials, and Metrology (JM3) publishes peer-reviewed papers on the core enabling technologies that address the patterning needs of the electronics industry.
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Source: openalex_inverted_index · Quality: needs review · Source record ↗
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Research context
OpenAlex topics: Optical Coatings and Gratings · Nanofabrication and Lithography Techniques
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Affiliations
PsiQuantum, LLC, Palo Alto, California
References
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