Special Section Guest Editorial: Direct Write Lithography
Source abstract
Abstract
The Journal of Micro/Nanopatterning, Materials, and Metrology (JM3) publishes peer-reviewed papers on the core enabling technologies that address the patterning needs of the electronics industry.
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Source: openalex_inverted_index · Quality: needs review · Source record ↗
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Research context
OpenAlex topics: Nanofabrication and Lithography Techniques · Advancements in Photolithography Techniques
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Affiliations
Nikon Research Corporation of America, Oro Valley, Arizona, United States
Commissariat à l’énergie atomique et aux énergies alternatives, Fontenay-aux-Roses, France
References
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