journal article·2021-04-28Open access

Straightforward path to Zernike polynomials

Anthony Yen

Abstract

Starting from Weierstrass’ approximation theorem, Zernike polynomials are obtained by a few straightforward steps involving only the recast of the aberration function as a double sum in the polar coordinates followed by the weighted orthogonalization of a power series. The origin of the name Fringe Zernike polynomials is also explained.
Source: openalex_inverted_index · Quality: baseline

Research context

OpenAlex topics: Optical Polarization and Ellipsometry

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

ASML Technology Development Center, San Jose, California, United States

References

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