Resolution formulas and near-resolution-limit images of a periodic structure
Source abstract
Abstract
Abbe’s resolution formulas for a grating imaged under on-axis, off-axis, and incoherent illuminations are obtained with the help of the line-spread function. A rule-of-thumb relationship applicable to the extreme ultraviolet mask for patterning a grating near the resolution limit of the imaging optics is given.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Advanced Fluorescence Microscopy Techniques · Optical Coatings and Gratings · Advanced optical system design
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
ASML Technology Development Center, San Jose, California, United States
References (23)
Show source-provided references
1. 10.1007/BF0295617310.1007/BF02956173 ↗
2. A contribution to the theory of the microscope, and the nature of microscopic vision
3. 10.1117/1.JMM.20.1.01050110.1117/1.JMM.20.1.010501 ↗
4. Born · 1999 · 467
5. Physical Image Formation
6. Helmholtz · 1873 · 625
7. Die theoretische Grenze für die Leistungsfärigkeit der Mikroskope
8. 10.1080/1478644740864099610.1080/14786447408640996 ↗
9. 10.1080/1478644740864101210.1080/14786447408641012 ↗
10. 10.1080/1478644790863968410.1080/14786447908639684 ↗
11. 10.1117/1.JMM.19.4.04050110.1117/1.JMM.19.4.040501 ↗
12. Goodman · 2017
13. Lummer · 1910
14. Lummer · 2022
15. 10.1080/1478644960862090210.1080/14786449608620902 ↗
16. Papoulis · 1962
17. Goodman · 2020
18. 10.1117/12.208509210.1117/12.2085092 ↗
19. 10.1117/1.JMM.21.3.03050110.1117/1.JMM.21.3.030501 ↗
20. 10.1117/12.253710410.1117/12.2537104 ↗
21. 10.1117/12.261429610.1117/12.2614296 ↗
22. 10.1117/1.JMM.20.2.02100610.1117/1.JMM.20.2.021006 ↗
23. Gradshteyn · 1980