Laser-induced Si3N4–TiN ceramics degradation
Source abstract
Abstract
Abstract This paper presents the process of degradation of the surface layer of Si3N4−TiN ceramics induced by a pulsed Nd:YAG laser. The dissociation of silicon nitride and titanium nitride in the irradiation zone is turned out to yield in a silicon depletion and so the zone becomes enriched with titanium, which, in turn, leads to the formation of TiSi2. This process of the TiSi2 formation can be considered as a ceramics metallization and its concentration depends on the energy delivered by the laser. The expansion of dissociation/evaporation products through the atmosphere is accompanied by the formation of SiO2 and TiO2, which are then deposited on the substrate as an amorphous film of complex composition.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Advanced ceramic materials synthesis · Metal and Thin Film Mechanics · Diamond and Carbon-based Materials Research
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
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