In situ electrical property quantification of memory devices by modulated electron microscopy
Bibliographic record
Abstract
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Research context
OpenAlex topics: Semiconductor materials and devices · Electron and X-Ray Spectroscopy Techniques · Integrated Circuits and Semiconductor Failure Analysis
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Affiliations
Hitachi High-Tech Corporation, Nano-Technology Solution Business Group, Hitachinaka-shi, Japan
KIOXIA Corporation, Advanced Memory Development Center, Yokkaichi-shi, Japan
Western Digital, Department Advanced Process and Device Development Group, Yokkaichi-shi, Japan
References (8)
Show source-provided references
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6. Development of in-line measurement method for transistor threshold voltage using SEM
7. 10.1117/12.265825010.1117/12.2658250 ↗
8. 10.1016/j.apsusc.2018.04.15510.1016/j.apsusc.2018.04.155 ↗