Micromachining features of TiC ceramic by femtosecond pulsed laser
Source abstract
Abstract
Femtosecond pulsed laser was employed to drill blind holes (or circle surfaces) and through holes in titanium carbide (TiC) ceramic by the helical drilling technique. The effects of spiral number, processing time, laser fluence and repetition rate on the qualities of holes (or circle surfaces) were investigated. Morphology of holes (or circle surfaces) and composition of irradiated areas were analyzed by a scanning electron microscope (SEM), a three-dimensional super depth digital microscope and energy dispersive spectroscopy (EDS), etc. The results indicated that laser fluence and repetition rate had major effects on ablation efficiency and quality. Blind holes with taper bottom were observed when the laser fluence was above 6.37 x 10(-1) J/mm(2). With the increase of laser fluence, hole depth increased firstly and then decreased. The change in hole diameter decreased when the laser fluence was above 0.51 J/mm(2). The effects of repetition rate on hole depth were similar to that of laser fluence, while it showed a faint change in hole diameter at laser fluence of 1.02 J/mm(2) and laser repetition rate ranging from 2 to 140 kHz. Furthermore, through holes were attained at narrowed laser fluence ranging from 0.51 to 1.53 J/mm(2). The drilled holes had good circular geometry for entrance and exit. (C) 2015 Elsevier Ltd and Techna Group S.r.l. All rights reserved.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Laser Material Processing Techniques · Advanced Surface Polishing Techniques · Advanced machining processes and optimization
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (36)
Show source-provided references
1. Laser machining of structural ceramics—a review10.1016/j.jeurceramsoc.2008.11.010 ↗
2. Surface integrity in electro-discharge machining, ultrasonic machining, and diamond saw cutting of ceramic composites10.1016/S0272-8842(00)00024-9 ↗
3. F. Qin, X.B. Gong, K. Chou, Size effects in cutting with a diamond-coated tool, in: Proceedings of the ASME 2011 International Manufacturing Science and Engineering Conference, Corvallis, Oregon, USA, 2011, pp.13–17.10.1115/MSEC2011-50234 ↗
4. Effect of process parameters on MRR, TWR and surface topography in ultrasonic machining of alumina–zirconia ceramic composite10.1016/j.ceramint.2014.04.137 ↗
5. Jahanmir · 1992 · vol. 834 · iii
6. Micromachining-review of literature from 1980 to 201010.7906/indecs.12.1.1 ↗
7. Intervening variables in electrochemical machining10.1016/j.jmatprotec.2006.03.105 ↗
8. Study of electrochemical machining characteristics of Al/SiCp composites10.1007/s00170-008-1704-1 ↗
9. Surface integrity and modification of electro-discharge machined alumina-based ceramic composite10.1016/S0924-0136(02)00065-1 ↗
10. Electrical discharge machining of ceramic matrix composites with ceramic fiber reinforcements10.1007/s00170-012-3995-5 ↗
11. Fuzzy modeling and simulation of ultrasonic drilling of porcelain ceramic with hollow stainless steel tools10.1080/10426910802714407 ↗
12. Micro-hole drilling and cutting using femtosecond fiber laser10.1117/1.OE.53.5.051513 ↗
13. Peculiarity of metal drilling with a commercial femtosecond laser10.1016/j.apsusc.2007.01.063 ↗
14. Ablation threshold and material removal mechanisms of SiC processed by femtosecond laser10.3901/JME.2010.21.172 ↗
15. Femtosecond laser drilling of alumina ceramic substrates10.1007/s00339-010-5816-8 ↗
16. Femtosecond laser drilling of alumina wafers10.1007/s11664-009-0811-6 ↗
17. New laser machining technology of Al2O3 ceramic with complex shape10.1016/j.ceramint.2012.01.003 ↗
18. Femtosecond laser-induced periodic surface structures revisited: a comparative study on ZnO10.1063/1.3074106 ↗
19. Ultra-short pulse laser deep drilling of C/SiC composites in air10.1007/s00339-012-7377-5 ↗
20. A method to quantify the drilling machinability of machinable ceramics from the view point of preventing chipping10.1016/j.ceramint.2013.05.090 ↗
21. Femtosecond laser directly writing microholes in Bi(Nb0.998V0.002)O4 ceramic and multi-photon induced large scale nanometer wires array
22. Multiple nanoscale parallel grooves formed on Si3N4/TiC ceramic by femtosecond pulsed laser10.1016/j.apsusc.2013.10.094 ↗
23. Femtosecond ultraviolet laser micromachining of Al2O3–TiC ceramics10.2351/1.521866 ↗
24. Spark plasma sintering of TiC ceramic with tungsten carbide as a sintering additive10.1016/j.jeurceramsoc.2013.04.017 ↗
25. A low cost fabrication route for continuous carbon fiber reinforced TiC based ceramic matrix composite10.1016/j.msea.2012.07.085 ↗
26. A simple method of synthesis and surface purification of titanium carbide powder10.1016/j.ijrmhm.2013.01.004 ↗
27. Generation of debris in the femtosecond laser machining of a silicon substrate10.1007/s00339-004-3192-y ↗
28. Enhancement of bovine bone ablation assisted by a transparent liquid layer on a target surface10.1109/JQE.2006.875867 ↗
29. Influence of substrate heating on hole geometry and spatter area in femtosecond laser drilling of silicon10.1063/1.4875928 ↗
30. Influence of substrate cooling on femtosecond laser machined hole depth and diameter10.1007/s00339-007-4132-4 ↗
31. Neckel · 1989
32. Ultrashort excitations of surface polaritons and waveguide modes in semiconductors10.1134/S0030400X08070114 ↗
33. On the role of surface plasmon polaritions in the formation of laser-induced periodic surface structures upon irradiation of silicon by femtosecond laser pulses10.1063/1.3261734 ↗
34. Femtosecond laser micro-structuring of alumina ceramic10.1016/j.apsusc.2005.03.005 ↗
35. Effect of femtosecond laser parameters on TiC ceramic micro-hole drilling10.3788/CJL201441.1003010 ↗
36. Laser helical drilling of silicon wafers with ns to fs pulses: scanning electron microscopy and transmission electron microscopy characterization of drilled through-holes10.2351/1.2164480 ↗