Enhancing optical and electrical properties of Al-doped ZnO coated polyethylene terephthalate substrates by laser annealing using overlap rate controlling strategy
Source abstract
Abstract
Abstract Aluminum-doped zinc oxide (AZO) layers were deposited on polyethylene terephthalate (PET) flexible substrates and optimized by laser annealing using a 532 nm nanosecond pulsed laser. Effects of overlap rates, i.e. laser spot overlap rate ( SO R ) and laser scan line overlap rate ( LO R ), on AZO/PET films were investigated by X-ray diffractometer (XRD), scanning electron microscope (SEM), UV–visible transmittance spectra and digital four-point probe instrument, respectively. Laser annealing could greatly enhance grain crystallinity, increase crystallite size and avoid damage to the PET flexible substrates, thus effectively enhance transmittance and conductivity of the films. The results showed that the AZO/PET film annealed by using 85% SO R and 60% LO R presented the highest average visible transmittance of 76.2% and the lowest resistivity of 1.95×10 −3 Ω cm, which respectively improved by approximately 23% and 75% compared to those of the as-deposited AZO/PET film. This work may be of great importance from the viewpoint of performance optimization of transparent conductive oxide (TCO) flexible films.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: ZnO doping and properties · Advanced Sensor and Energy Harvesting Materials · Thin-Film Transistor Technologies
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (36)
Show source-provided references
1. Influence of ZnO buffer layer thickness on the electrical and optical properties of indium zinc oxide thin films deposited on PET substrates10.1016/j.ceramint.2007.09.083 ↗
2. Influence of various thickness metallic interlayers on opto-electric and mechanical properties of AZO thin films on PET substrates10.1016/j.apsusc.2011.12.016 ↗
3. Low temperature rf-sputtered In and Al co-doped ZnO thin films deposited on flexible PET substrate10.1016/j.ceramint.2014.02.101 ↗
4. Introduction of Ag nanoparticles and AZO layer to prepare AZO/Ag/FTO trilayer films with high overall photoelectric properties10.1016/j.ceramint.2014.01.087 ↗
5. Preparation and properties of AZO thin films on different substrates10.1016/S1002-0071(12)60005-7 ↗
6. Effects of pre-strain applied at a polyethylene terephthalate substrate before the coating of Al-doped ZnO film on film quality and optical and electrical properties10.1016/j.ceramint.2011.03.042 ↗
7. Radio frequency sputter deposition of high-quality conductive and transparent ZnO:Al films on polymer substrates for thin film solar cells applications10.1016/j.tsf.2008.11.097 ↗
8. Structural and optoelectronic properties of Al-doped zinc oxide films deposited on flexible substrates by radio frequency magnetron sputtering10.1016/j.tsf.2011.05.017 ↗
9. The characteristics of transparent conducting Al-doped zinc oxide thin films deposited on polymer substrates
10. Fabrication and characterization of transparent conductive ZnO:Al thin films deposited on polyethylene terephthalate substrates10.1111/j.1551-2916.2012.05178.x ↗
11. Characterization of electrospun aluminum-doped zinc oxide nanofibers10.1016/j.tsf.2008.05.027 ↗
12. Effects of annealing temperature on ZnO and AZO films prepared by sol–gel technique10.1016/j.apsusc.2012.05.156 ↗
13. Effects of doping concentration and annealing temperature on properties of highly-oriented Al-doped ZnO films10.1016/j.jcrysgro.2005.10.047 ↗
14. Electrical and mechanical stability of aluminum-doped ZnO films grown on flexible substrates by atomic layer deposition10.1016/j.mseb.2014.03.002 ↗
15. Electric properties and surface characterization of transparent Al-doped ZnO thin films prepared by pulsed laser deposition10.1016/j.tsf.2007.07.095 ↗
16. Highly transparent and infrared reflective AZO/Ag/AZO multilayer film prepared on PET substrate by RF magnetron sputtering10.1016/j.vacuum.2014.02.021 ↗
17. Room temperature DC magnetron sputtering deposition of hydrogenated aluminum doped zinc oxide thin films on polyethylene terephthalate substrates10.1016/j.matlet.2013.05.063 ↗
18. Flexible high efficiency perovskite solar cells10.1039/c3ee43619e ↗
19. A simple annealing process to obtain highly transparent and conductive indium doped tin oxide for dye-sensitized solar cells10.1016/j.ceramint.2013.09.086 ↗
20. Effect of annealing treatment on electrical and optical properties of Nb doped TiO2 thin films as a TCO prepared by sol–gel spin coating method10.1016/j.apsusc.2014.08.029 ↗
21. Effects of nanosecond laser irradiation on photoelectric properties of AZO/FTO composite films10.1016/j.apsusc.2012.11.065 ↗
22. Effects of laser annealing parameters on optical and electrical properties of ITO/metallic glass alloy bi-layer films10.1186/s11671-015-0982-4 ↗
23. Laser annealing process of ITO thin films using beam shaping technology10.1016/j.optlaseng.2011.10.002 ↗
24. The effect of laser patterning parameters on fluorine-doped tin oxide films deposited on glass substrates10.1016/j.apsusc.2011.04.055 ↗
25. Structural and mechanical properties of pre-strained transparent conducting oxide films on flexible substrate10.1016/j.surfcoat.2012.04.046 ↗
26. Study of the optical, electrical and corrosion resistance properties of AZO layers deposited by DC pulsed magnetron sputtering10.1016/j.surfcoat.2014.12.062 ↗
27. Improving the performance of nickel-coated fluorine-doped tin oxide thin films by magnetic-field-assisted laser annealing10.1016/j.apsusc.2015.05.094 ↗
28. Sonocatalytic degradation of a textile dye over Gd-doped ZnO nanoparticles synthesized through sonochemical process10.1016/j.ultsonch.2014.08.023 ↗
29. Effects of laser-induced recovery process on conductive property of SnO2:F thin films10.1016/j.mseb.2010.10.011 ↗
30. Static electric field enhanced recrystallization of copper phthalocyanine thin film during annealing10.1016/j.jcrysgro.2013.05.040 ↗
31. Surface morphology and photoelectric properties of fluorine-doped tin oxide thin films irradiated with 532nm nanosecond laser10.1016/j.ceramint.2013.07.053 ↗
32. Excimer laser-induced surface modification of poly (ethylene terephthalate)
33. Laser-assisted preparation and photoelectric properties of grating-structured Pt/FTO thin films10.1016/j.apsusc.2014.06.184 ↗
34. Two-step preparation of laser-textured Ni/FTO bilayer composite films with high photoelectric properties10.1016/j.jallcom.2015.04.009 ↗
35. Excimer laser processing of ZnO thin films prepared by the sol–gel process10.1016/j.apsusc.2007.08.072 ↗
36. Design and fabrication of nanometric ZnS/Ag/MoO3 transparent conductive electrode and investigating the effect of annealing process on its characteristics10.1016/j.physe.2012.09.031 ↗