Nanostructured TiO2 films: Enhanced NH3 detection at room temperature
Source abstract
Abstract
Abstract The influence of substrate bias on the ammonia (NH 3 ) sensing properties of reactive dc magnetron sputtered titanium dioxide (TiO 2 ) films has been investigated. The films deposited at floating potential and −100 V substrate bias exhibited a mixed phase (anatase and rutile) as analysed by X-ray diffraction (XRD) while the films deposited at −200 V substrate bias had only rutile phase. On increasing the substrate bias voltage the grain size increased from 15 to 31 nm and the optical band gap value decreased. The TiO 2 films had an enhanced response towards NH 3 in the concentration range 5−100 ppm at room temperature. The enhanced performances are correlated to the high surface-to-bulk ratio and crystal structure. The TiO 2 film deposited at lower bias has enhanced sensitivity of (S-7857) towards NH 3 at room temperature with quick response and recovery time.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Gas Sensing Nanomaterials and Sensors · Analytical Chemistry and Sensors · Advanced Chemical Sensor Technologies
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (38)
Show source-provided references
1. Ammonia sensors and their applications—a review10.1016/j.snb.2004.11.054 ↗
2. Gas sensitivity of ZnO based thick film sensor to NH3 at room temperature10.1016/S0925-4005(99)00049-0 ↗
3. Optical and room temperature sensing properties of highly oxygen deficient flower-like ZnO nanostructures10.1016/j.apsusc.2010.08.093 ↗
4. Preparing large-scale WO3 nanowire-like structure for high sensitivity NH3 gas sensor through a simple route10.1016/j.cap.2010.11.002 ↗
5. Room temperature ammonia sensing properties of W18O49 nanowires10.1016/j.snb.2009.01.004 ↗
6. TiO2 thin film gas sensor for monitoring ammonia10.1016/j.matchar.2006.11.007 ↗
7. Sensor response of sol–gel multiwalled carbon nanotubes–TiO2 composites deposited by screen-printing and dip-coating techniques10.1016/j.snb.2009.04.006 ↗
8. New applications of tin oxide gas sensors: II. intelligent sensor system for reliable monitoring of ammonia leakages10.1016/S0925-4005(01)00970-4 ↗
9. On an indium-tin-oxide thin film based ammonia gas sensor10.1016/j.snb.2011.07.041 ↗
10. Tribological behavior of sol–gel TiO2 films on glass10.1016/S0043-1648(02)00139-4 ↗
11. Low temperature growth of rutile TiO2 films in modified rf magnetron sputtering10.1016/S0257-8972(00)00999-3 ↗
12. Characterization of TiO2 deposited on textured silicon wafers by atmospheric pressure chemical vapour deposition10.1016/j.solmat.2004.07.011 ↗
13. Elaboration and characterization of nanocrystalline TiO2 thin films prepared by sol–gel dip-coating10.1016/j.surfcoat.2011.06.053 ↗
14. Optical and structural properties of TiO2 thin films prepared by sol–gel spin coating10.1016/j.ijhydene.2010.07.057 ↗
15. TiO2 anatase thin films deposited by spray pyrolysis of an aerosol of titanium diisopropoxide10.1016/j.tsf.2004.07.010 ↗
16. Effect of sputtering pressure and post-annealing on hydrophilicity of TiO2 thin films deposited by reactive magnetron sputtering10.1016/j.tsf.2010.04.106 ↗
17. Joint Committee on Powder Diffraction Standards (JCPDS), Powder Diffraction File, Card no. 21-1272, Swarthmore, PA.
18. Formation of crystallographic texture in rf sputter deposited Cr thin films10.1063/1.358019 ↗
19. Cullity · 1956
20. Tauc · 1974 · 159
21. Influence of substrate and annealing temperatures on optical properties of RF-sputtered TiO2 thin films10.1016/j.optmat.2009.07.011 ↗
22. A study on structural, optical, electrical and microstructural properties of thin TiOx films upon thermal oxidation: effect of substrate temperature and oxidation temperature10.1016/j.physb.2009.08.031 ↗
23. Nanostructured cadmium oxide thin films for hydrogen sensor10.1016/j.ijhydene.2012.08.098 ↗
24. Sensing properties to dilute chlorine gas of indium oxide based thin film sensors prepared by electron beam evaporation10.1016/S0925-4005(01)01039-5 ↗
25. Metal oxides for solid-state gas sensors: what determines our choice?10.1016/j.mseb.2007.01.044 ↗
26. Ozone sensors on the base of SnO2 films deposited by spray pyrolysis10.1016/j.snb.2006.03.029 ↗
27. Studies on the room temperature growth of nanoanatase phase TiO2 thin films by pulsed dc magnetron with oxygen as sputter gas10.1063/1.2714770 ↗
28. Anatase TiO2 films based CO gas sensor: film thickness, substrate and temperature effects
29. Room temperature ammonia gas sensor based on polyaniline–TiO2 nanocomposite10.1109/JSEN.2011.2160392 ↗
30. Cellulose–titanium dioxide–multiwalled carbon nanotube hybrid nanocomposite and its ammonia gas sensing properties at room temperature10.1016/j.snb.2012.06.066 ↗
31. Gas sensing properties of metal-organics derived Pt dispersed-TiO2 thin film fired in NH310.1016/S0925-4005(00)00517-7 ↗
32. Influence of polymerization temperature on NH3 response of PANI/TiO2 thin film gas sensor10.1016/j.snb.2007.08.013 ↗
33. Fabrication and gas sensitivity of polyaniline–titanium dioxide nanocomposite thin film10.1016/j.snb.2007.03.013 ↗
34. Fabrication of nanocrystalline TiO2 thin film ammonia vapor sensor10.4236/jst.2011.11002 ↗
35. Chemical sensors based on nanostructured materials10.1016/j.snb.2006.06.022 ↗
36. Approaches and mechanisms to solid state based sensing10.1016/S0925-4005(96)02006-0 ↗
37. The room temperature ammonia sensor based on improved CuxS-micro-porous-Si structure10.1016/S0925-4005(01)00814-0 ↗
38. Metal and metal oxide nanoparticles in chemiresistors: does the nanoscale matter?10.1002/smll.200500261 ↗