journal article·2025-03Open access

Preparation of β-Ga2O3/ε-Ga2O3 type II phase junctions by atmospheric pressure chemical vapor deposition

Xianxu Li, Jiale Niu, Lijian Bai, Xue Jing, Dongwen Gao, Jiajun Deng, Fangchao Lu, Wenjie Wang

Ceramics International· Volume 51· Issue 8

Abstract

We synthesized β-Ga 2 O 3 /ε-Ga 2 O 3 phase junctions by exploiting distinct crystalline phases in gallium oxide through a one-step atmospheric-pressure chemical vapor deposition process on sapphire substrates , adjusting parameters such as temperature and gas flow rate accordingly. The coexistence of these two crystalline phases was verified via X-ray diffraction (XRD) and Raman spectroscopy analyses, while optical microscopy provided visual evidence regarding surface morphology changes throughout phase junction formation stages. Furthermore, we utilized a UV–visible spectrophotometer to quantify the bandgap and integrated this data with X-ray photoelectron spectroscopy (XPS) analysis of core level peaks and valence band spectra in order to construct an energy level structure for the β-Ga 2 O 3 /ε-Ga 2 O 3 phase junction. Our findings demonstrate that this phase junction exhibits a type II energy band alignment, with measured valence and conduction band offsets of 0.54 eV and 0.41 eV respectively. This discovery holds significant implications for self-powered photodetectors utilizing gallium oxide as well as other potential applications.
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Research context

OpenAlex topics: Ga2O3 and related materials · Advanced Photocatalysis Techniques · ZnO doping and properties

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