Subtractive manufacturing of polymer-derived ceramic composite thick film sensor based on ultrafast laser etching
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OpenAlex topics: Advanced Sensor Technologies Research · Advanced Fiber Optic Sensors · Laser Material Processing Techniques
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References (45)
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1. Durable heat flux sensor for extreme temperature and heat flux environments10.2514/1.42298 ↗
2. Fast response surface temperature sensor for hypersonic vehicles10.1134/S0020441210010288 ↗
3. High-frequency response heat flux gauge10.1063/1.1138882 ↗
4. In situ high temperature heat flux sensor calibration10.1016/j.ijheatmasstransfer.2010.03.042 ↗
5. Panoramic scanning optical pyrometer for the temperature field measurement of turbine components
6. A temperature field reconstruction method for spacecraft leading edge structure with optimized sensor array10.1177/1045389X20983893 ↗
7. Fabrication and calibration of Pt-10%Rh/Pt thin film thermocouples10.1016/j.measurement.2013.11.018 ↗
8. Optical fiber sensors for high-temperature monitoring: a review
9. The effect of the nickel and chromium concentration ratio on the temperature coefficient of the resistance of a Ni-Cr thin film-based temperature sensor10.1016/j.sna.2017.04.024 ↗
10. Fabrication and characterization of ITO thin film resistance temperature detector10.1016/j.vacuum.2016.07.028 ↗
11. High temperature static and dynamic strain response of PdCr thin film strain gauge prepared on Ni-based superalloy10.1016/j.sna.2019.111571 ↗
12. High-sensitive thin film heat flux gauge with ITO/In2O3 thermopile on nickel alloys for turbine blade applications10.1109/JSEN.2021.3133349 ↗
13. High-temperature heat flux sensor based on tungsten-rhenium thin-film thermocouple10.1109/JSEN.2020.2993592 ↗
14. Pt thin-film resistance temperature detector on flexible Hastelloy tapes10.1016/j.vacuum.2020.109966 ↗
15. Additive manufacturing of polymer-derived ceramics: materials, technologies, properties and potential applications10.1016/j.pmatsci.2022.100969 ↗
16. Additive manufacturing of polymer-derived ceramics10.1126/science.aad2688 ↗
17. In situ laser fabrication of polymer-derived ceramic composite thin-film sensors for harsh environments10.1021/acsami.1c24628 ↗
18. An anti-oxidative coating made from particle-filled SiCN precursor for applications up to 800 °C10.1016/j.jallcom.2022.165236 ↗
19. Thin-film temperature sensor made from particle-filled polymer-derived ceramics pyrolyzed in vacuum10.1016/j.jeurceramsoc.2022.01.035 ↗
20. Abnormal graphitization behavior in near-surface/interface region of polymer-derived ceramics
21. Rapid printing of high-temperature polymer-derived ceramic composite thin-film thermistor with laser pyrolysis10.1021/acsami.2c20927 ↗
22. Bioinspired high tolerant vein-membrane Al2O3 coating10.1002/adfm.202215135 ↗
23. Direct visualization of the complete evolution of femtosecond laser-induced surface structural dynamics of metals
24. Surface-texturing of sapphire by femtosecond laser pulses for photonic applications10.1088/0022-3727/43/14/145501 ↗
25. Fabrication of black silicon with thermostable infrared absorption by femtosecond laser10.1109/JPHOT.2016.2617403 ↗
26. 4D additive-subtractive manufacturing of shape memory ceramics
27. Dry-etching-assisted femtosecond laser machining
28. Plasmonic nano-printing: large-area nanoscale energy deposition for efficient surface texturing10.1038/lsa.2017.112 ↗
29. Femtosecond pulse laser ablation of sapphire in ambient air10.1016/j.apsusc.2004.01.009 ↗
30. Rapid fabrication of large-area concave microlens arrays on PDMS by a femtosecond laser10.1021/am402923t ↗
31. Laser-assisted multiscale fabrication of configuration-editable supercapacitors with high energy density10.1021/acsnano.9b02176 ↗
32. Laser-assisted large-scale fabrication of all-solid-state asymmetrical micro-supercapacitor array
33. Fundamentals of laser-based hydrogel degradation and applications in cell and tissue engineering10.1002/adhm.201700681 ↗
34. Two-step femtosecond laser etching for bulk micromachining of 4H-SiC membrane applied in pressure sensing10.1016/j.ceramint.2022.01.100 ↗
35. Application of femtosecond laser micromachining in silicon carbide deep etching for fabricating sensitive diaphragm of high temperature pressure sensor10.1016/j.sna.2020.112017 ↗
36. Femtosecond laser processing assisted SiC high-temperature pressure sensor fabrication and performance test10.3390/mi14030587 ↗
37. Manufacturing smart surfaces with embedded sensors via magnetron sputtering and laser scribing10.1016/j.apsusc.2022.154844 ↗
38. Femtosecond laser pulse ablation characteristics of polymer-derived SiAlCN ceramics10.1016/j.ceramint.2019.12.243 ↗
39. Femtosecond laser micromachining in combination with ICP etching for 4H-SiC pressure sensor membranes10.1016/j.ceramint.2020.10.220 ↗
40. TiB2/SiCN thin-film strain gauges fabricated by direct writing for high-temperature application10.1109/JSEN.2022.3172346 ↗
41. Conformal fabrication of functional polymer-derived ceramics thin films10.1016/j.surfcoat.2023.129536 ↗
42. Thermal and fluid processes of a thin melt zone during femtosecond laser ablation of glass: the formation of rims by single laser pulses10.1088/0022-3727/40/5/021 ↗
43. TiB2-modified polymer-derived ceramic SiCN double-layer thin films fabricated by direct writing for high-temperature application10.1002/adem.202200228 ↗
44. TiB2-modified PDC electrical solder joints for electrical interconnection in extreme environments10.1016/j.ceramint.2022.05.237 ↗
45. High-tolerance thin-film solder joints for electrical interconnection in harsh environments10.1109/JSEN.2023.3268298 ↗