journal article·2024-12

Nanocasting synthesis of mesoporous CeO2 particle abrasives from mesoporous SiO2 hard templates for enhanced chemical mechanical polishing performance

Yang Chen, Yifan Xia, Chao Wang, Jie Pan, Tianyu Wang, Ailian Chen

Ceramics International· Volume 50· Issue 24
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Abstract

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OpenAlex topics: Advanced Surface Polishing Techniques · Diamond and Carbon-based Materials Research · Minerals Flotation and Separation Techniques

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