journal article·2024-09

Application of the Fenton reaction in silicon carbide polishing and its oxidative active center

Xiaodong Hao, Jiapeng Chen, Xiongjie Wu, Jie Lin, Anjie He, Zhenlin Jiang, Wenjun Wang, Baoxiu Wang, Tao Sun

Ceramics International· Volume 50· Issue 18
Publisher page

Abstract

No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.

Source: Not provided · Quality: missing

Research context

OpenAlex topics: Advanced Surface Polishing Techniques · Diamond and Carbon-based Materials Research · Advanced ceramic materials synthesis

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References (34)

Show source-provided references
1. A novel slurry for chemical mechanical polishing of single crystal diamond
2. Doping strategy on properties and chemical mechanical polishing performance of CeO2 Abrasives: a DFT assisted experimental study
3. Environment-friendly electrochemical mechanical polishing using solid polymer electrolyte/CeO2 composite pad for highly efficient finishing of 4H-SiC (0001) surface
4. Revealing the mechanisms for inactive rolling and wear behaviour on chemical mechanical planarization
5. High efficient polishing of sliced 4H-SiC (0001) by molten KOH etching
6. Performance of colloidal silica and ceria based slurries on CMP of Si-face 6H-SiC substrates10.1016/j.apsusc.2015.10.158 ↗
7. The mechanism of Fenton reaction of hydrogen peroxide with single crystal 6H-SiC substrate
8. The influence of concentration of hydroxyl radical on the chemical mechanical polishing of SiC wafer based on the Fenton reaction10.1016/j.precisioneng.2017.12.011 ↗
9. Study on OH radical oxidation of 4H-SiC in plasma based on ReaxFF molecular dynamics simulation
10. Effects of polishing media on the surface chemical and micromechanical properties of SiC
11. Investigation on material removal mechanisms in photocatalysis-assisted chemical mechanical polishing of 4H–SiC wafers10.1007/s12541-021-00494-1 ↗
12. Polishing of diamond, SiC, GaN based on the oxidation modification of hydroxyl radical: status, challenges and strategies
13. Enhancement mechanism of chemical mechanical polishing for single-crystal 6H-SiC based on Electro-Fenton reaction
14. Basic research on chemical mechanical polishing of single-crystal SiC—Electro–Fenton: reaction mechanism and modelling of hydroxyl radical generation using condition response modelling10.1016/j.jece.2020.104954 ↗
15. The polishing properties of magnetorheological-elastomer polishing pad based on the heterogeneous Fenton reaction of single-crystal SiC10.1016/j.precisioneng.2022.09.006 ↗
16. Effect of the carboxyl group number of the complexing agent on polishing performance of alumina slurry in sapphire CMP10.1016/j.ceramint.2022.12.246 ↗
17. Copper(II) containing chitosan hydrogel as a heterogeneous Fenton-like catalyst for production of hydroxyl radical: a quantitative study10.1016/j.ijbiomac.2021.12.150 ↗
18. Accelerated C-face polishing of silicon carbide by alkaline polishing slurries with Fe3O4 catalysts10.1016/j.jece.2021.106863 ↗
19. High efficiency polishing of silicon carbide by applying reactive non-aqueous fluids to fixed abrasive pads10.1016/j.ceramint.2021.11.288 ↗
20. Enhancement mechanism of chemical mechanical polishing for GaN based on electro-fenton reaction10.1149/2162-8777/acb736 ↗
21. Evaluation of relative efficiency of PDT photosensitizers in producing hydroxyl radicals and singlet oxygen in aqueous media using a UV-visible spectroscopy pNDA dosage10.1016/j.jphotobiol.2023.112664 ↗
22. XPS, UV–vis spectroscopy and AFM studies on removal mechanisms of Si-face SiC wafer chemical mechanical polishing (CMP)10.1016/j.apsusc.2014.08.011 ↗
23. Enhanced Fenton-like catalysis by iron-based metal organic frameworks for degradation of organic pollutants10.1016/j.jcat.2017.09.015 ↗
24. Hydroxyl radicals in natural waters: light/dark mechanisms, changes and scavenging effects
25. Photochemistry of iron in aquatic environments
26. Enrofloxacin transformation on shewanella oneidensis MR-1 reduced goethite during anaerobic–aerobic transition10.1021/acs.est.6b03054 ↗
27. Contaminant degradation by •OH during sediment oxygenation: dependence on Fe(II) species10.1021/acs.est.9b04870 ↗
28. Surfactant concentration and pH effects on the zeta potential values of alumina nanofluids to inspect stability
29. An experimental and new study on thermal conductivity and zeta potential of Fe3O4/water nanofluid: machine learning modeling and proposing a new correlation
30. Microwetting dynamic behavior and mechanism for coal dust based on low field NMR method—a case study
31. Application of LF-NMR to characterize the roles of different emulsifiers in 3D printed emulsions
32. Pathway for the production of hydroxyl radicals during the microbially mediated redox transformation of iron (Oxyhydr)oxides10.1021/acs.est.9b06220 ↗
33. Evaluation of relative efficiency of PDT photosensitizers in producing hydroxyl radicals and singlet oxygen in aqueous media using a UV–visible spectroscopy pNDA dosage10.1016/j.jphotobiol.2023.112664 ↗
34. In-situ manifestation of lapping mechanisms by rapid intelligent pattern recognition analysis (RIPRA) of acoustic emission via a point density fuzzy C-means (PD-FCM) method10.1016/j.jmapro.2022.05.035 ↗