journal article·2024-06

Synergistic effect of abrasive friction and glycine on improving chemical mechanical polishing performance of single-crystal GaN substrate

Congming Ke, Shoulin Liu, Yiao Pang, Yongping Wei, Yaping Wu, Qiufa Luo, Yueqin Wu, Jing Lu

Ceramics International· Volume 50· Issue 12
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OpenAlex topics: Metal and Thin Film Mechanics · MXene and MAX Phase Materials · Diamond and Carbon-based Materials Research

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