Investigation of mechanism and surface morphology on the femtosecond laser ablation of silicon nitride under different auxiliary processing environments
Bibliographic record
Abstract
No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.
Source: Not provided · Quality: missing
Research context
OpenAlex topics: Laser Material Processing Techniques · Diamond and Carbon-based Materials Research · Laser-induced spectroscopy and plasma
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (43)
Show source-provided references
1. High-temperature mechanical properties of ZrB2/SiC/Si3N4 ceramic tool materials with dual composite architectures10.1016/j.ceramint.2021.09.189 ↗
2. Experimental and theoretical study on air reaction wetting and brazing of Si3N4 ceramic by Ag-CuO filler metal: performance and interfacial behavior10.1016/j.jeurceramsoc.2021.10.039 ↗
3. Silicon nitride, A close to ideal ceramic material for medical application[J]10.3390/ceramics4020016 ↗
4. Fabrication of dense β-Si3N4-based ceramic coating on porous Si3N4 ceramic10.1016/j.jeurceramsoc.2014.10.015 ↗
5. Study on grinding force of Si3N4 ceramics in random rotation grinding with truncated polyhedral grains10.1007/s00170-021-07372-0 ↗
6. Comparative study on the performance of the MQL nanolubricant and conventional flood lubrication techniques during grinding of Si3N4 ceramic10.1007/s00170-018-1689-3 ↗
7. On the finishing of Si3N4 balls for bearing applications10.1016/S0043-1648(97)00236-6 ↗
8. Experimental investigation of surface/subsurface damage formation and material removal mechanisms in SiC grinding10.1016/j.ijmachtools.2007.10.013 ↗
9. Effect of geometry measurements on characteristics of femtosecond laser ablation of HR4 nickel alloy10.1016/j.optlaseng.2014.07.011 ↗
10. Miyamoto · 2014
11. Dahotre · 2008
12. Assembling an endcap to optical fibers by femtosecond laser welding and milling10.1364/OME.3.001742 ↗
13. Ultrafast Raman fiber laser: a review and prospect[J]10.1186/s43074-022-00064-2 ↗
14. Femtosecond laser-induced periodic structure writing on diamond crystals and microclusters10.1063/1.125439 ↗
15. Pecholt · 2011
16. Laser ablation mechanism of silicon nitride layers in a nanosecond UV regime
17. Fabrication of through holes in silicon carbide using femtosecond laser irradiation and acid etching10.1016/j.apsusc.2013.11.030 ↗
18. Response of silicon nitride ceramics subject to laser shock treatment10.1016/j.ceramint.2021.08.369 ↗
19. Laser-assisted milling of silicon nitride ceramics and inconel 71810.1115/1.2927447 ↗
20. Study on ultrasonic-assisted laser machining of Si3N410.4028/www.scientific.net/KEM.693.914 ↗
21. Laser beam machining—a review[J]10.1016/j.ijmachtools.2007.10.017 ↗
22. Experimental and numerical study of laser-assisted machining of Ti6Al4V titanium alloy10.1016/j.finel.2014.08.006 ↗
23. Lu · 2016
24. Removal of the heat affect zone created by EDM with pico-second LASER machining10.1016/j.procir.2016.02.235 ↗
25. Herbst · 2003
26. The effect of laser texturing of SiC surface on the critical load for the transition of water lubrication mode from hydrodynamic to mixed10.1016/S0301-679X(01)00063-9 ↗
27. Ultrasound-assisted water-confined laser micromachining: a novel machining process10.1016/j.mfglet.2014.06.001 ↗
28. Laser micro-milling under a thin and flowing water layer: a new concept of liquid-assisted laser machining process10.1177/0954405415580542 ↗
29. Fabrication of embedded microfluidic channels in low temperature co-fired ceramic technology using laser machining and progressive lamination10.1016/j.jeurceramsoc.2011.05.039 ↗
30. Vibration assisted femtosecond laser machining on metal10.1016/j.optlaseng.2012.01.017 ↗
31. Study on the mechanism of ultrasonic-assisted water confined laser micromachining of silicon[J]10.1016/j.optlaseng.2020.106118 ↗
32. Effect of the grain refinement via severe plastic deformation on strength properties and deformation behavior of an Al6061 alloy at room and cryogenic temperatures[J]10.1016/j.matlet.2011.06.057 ↗
33. Cryogenic ultrahigh strain rate deformation induced hybrid nanotwinned microstructure for high strength and high ductility[J]10.1063/1.4881555 ↗
34. Competitive mechanism of laser energy and pulses on holes ablation by femtosecond laser percussion drilling on AlN ceramics[J]10.1016/j.ceramint.2022.08.189 ↗
35. A model of laser ablation with temperature-dependent material properties, vaporization, phase explosion and plasma shielding[J]10.1007/s00339-013-8118-0 ↗
36. Ultrafast laser processing of materials: a review[J]10.1364/AOP.7.000684 ↗
37. Trapped ion effect on shielding, current flow, and charging of a small object in a plasma10.1063/1.1562163 ↗
38. Synthesis of Hf6Ta2O17 superstructure via spark plasma sintering for improved oxidation resistance of multi-component ultra-high temperature ceramics[J]10.1016/j.ceramint.2022.09.050 ↗
39. Wang · 2022 · 147
40. Effect of surface roughness on the ultrashort pulsed laser ablation fluence threshold of zinc and steel[J]10.1016/j.apsusc.2019.05.066 ↗
41. High quality full ablation cutting and stealth dicing of silica glass using picosecond laser Bessel beam with burst mode[J]10.1016/j.ceramint.2021.12.182 ↗
42. Prevention in thermal crack formation in chabazite (CHA) zeolite membrane by developing thin top zeolite and thick intermediate layers10.3390/nano11082113 ↗
43. Characterization of hole taper in laser drilling of silicon nitride ceramic under water [J]10.1016/j.ceramint.2018.04.173 ↗