Crystallographic orientation effect on the polishing behavior of LiTaO3 single crystal and its correlation with strain rate sensitivity
Source abstract
Abstract
Abstract Lithium tantalite (LiTaO3 or LT) single crystal has been extensively applied in the fields of electro-optical and piezoelectric devices. As a typical anisotropic material, the crystallographic orientation effect on its machining responses, i.e., surface roughness and material removal rate (MRR), is not yet well understood. In the present work, we investigated the polishing responses of the three typical crystallographic orientations for LT single crystal under a series of rotation speeds. The results showed that both the rotation speed and crystalline orientation had little effect on the quality of polished surface. While for the MRR, it was almost linearly increased with increasing rotation speed for all of the three planes, among which the enhancements of MRR on Y-42° and Y-36° planes were more pronounced than that on X-112° plane. The scratch features and friction coefficients were investigated using a nanoindentation system under various velocities. The nano-hardness values were obtained under various strain rates and, hence, the strain rate sensitivities (SRS) were determined as 0.0172, 0.0455, and 0.043 for X-112°, Y-42°, and Y-36° planes, respectively. The better mechanical properties and “plastic” removal mechanism of X-112° plane resulted in the lower value of MRR. Also, the much lower SRS corresponded well with the relatively less sensitivity of MRR with rotation speed on X-112° plane. Results of this study suggested that the plastic parameter of SRS could provide as an excellent indicator to bridge the machining response and intrinsic deformation mechanism for brittle single crystal ceramics.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Advanced Surface Polishing Techniques · Metal and Thin Film Mechanics · Advanced ceramic materials synthesis
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (32)
Show source-provided references
1. Observation of nuclear fusion driven by a pyroelectric crystal10.1038/nature03575 ↗
2. Enhanced electro-optic effect in potassium lithium tantalate niobate at the paraelectric phase near Tc10.1016/j.rinp.2021.104059 ↗
3. In situ TEM observation of crack propagation in LiTaO3 particle toughened Al2O3 ceramics10.1016/j.ceramint.2010.10.002 ↗
4. Effect of proton exchange on periodically poled ferroelectric domains in lithium tantalite10.1016/S0925-3467(00)00013-6 ↗
5. Incipient plasticity and surface damage in LiTaO3 and LiNbO3 single crystals10.1016/j.matdes.2018.04.082 ↗
6. Strength distribution and fracture analyses of LiNbO3 and LiTaO3 single crystals under biaxial loading10.1016/j.jeurceramsoc.2017.02.002 ↗
7. Deformation and stress at pop-in of lithium niobate induced by nanoindentation10.1016/j.scriptamat.2014.01.018 ↗
8. Research on chemo-mechanical grinding of large size quartz glass substrate10.1016/j.precisioneng.2009.01.006 ↗
9. Study on grinding of LiTaO3 using effective cooling and electrolyte solution10.1016/j.precisioneng.2015.10.001 ↗
10. A robust procedure of data analysis for micro/nano indentation10.1016/j.precisioneng.2012.11.003 ↗
11. Effect of citric acid in chemical mechanical polishing (CMP) for lithium tantlate (LiTaO3) wafer10.4028/www.scientific.net/AMR.1136.305 ↗
12. Study on chemical mechanical polishing mechanism of LiTaO3 wafer10.4028/www.scientific.net/KEM.304-305.310 ↗
13. Research on fabricating Y36-cut LiTaO3 wafer for SAW
14. Ultrathin LiTaO3 wafer prepared by wafer bonding and mechanical thinning processes
15. Orientation-independent yield stress and activation volume of dislocation nucleation in LiTaO3 single crystal by nanoindentation10.3390/ma12172799 ↗
16. Room-temperature creep behavior and activation volume of dislocation nucleation in a LiTaO3 single crystal by nanoindentation10.3390/ma12101683 ↗
17. On the room-temperature creep behavior and its correlation with length scale of a LiTaO3 single crystal by spherical nanoindentation10.3390/ma12244213 ↗
18. Nanoindentation size effect on stochastic behavior of incipient plasticity in a LiTaO3 single crystal10.1016/j.engfracmech.2020.106877 ↗
19. Wavelength-selective infrared detector fabricated by integrating LiTaO3 with a metamaterial perfect absorber10.1016/j.sna.2020.112186 ↗
20. Research of material removal and deformation mechanism for single crystal GGG (Gd3Ga5O12) based on varied-depth nanoscratch testing10.1016/j.matdes.2017.04.018 ↗
21. Repeated nanoscratch and double nanoscratch tests of Lu2O3 transparent ceramics: material removal and deformation mechanism, and theoretical model of penetration depth10.1016/j.jeurceramsoc.2017.09.028 ↗
22. Modification of the Preston equation for the chemical mechanical polishing of copper10.1016/S0040-6090(98)00896-7 ↗
23. Science and art of ductile grinding of brittle solids10.1016/j.ijmachtools.2020.103675 ↗
24. Multi-scale dimple creation on metallic glass by a two-step method involving nanoindentation and polishing10.1016/j.apsusc.2018.08.180 ↗
25. Nanomechanical characterization of RB-SiC ceramics based on nanoindentation and modelling of the ground surface roughness10.1016/j.ceramint.2019.11.094 ↗
26. Critique of materials-based models of ductile machining in brittle solids10.1111/jace.17344 ↗
27. Subsurface damage evaluation in the single abrasive scratching of BK7 glass by considering coupling effect of strain rate and temperature
28. Zhao · 2022
29. Depth dependent strain rate sensitivity and inverse indentation size effect of hardness in body-centered cubic nanocrystalline metals10.1016/j.msea.2014.07.057 ↗
30. A new approach for determining GND and SSD densities based on indentation size effect: an application to additive-manufactured Hastelloy X10.1016/j.jmst.2021.05.005 ↗
31. Effect of nanocrystalline and ultrafine grain sizes on the strain rate sensitivity and activation volume: fcc versus bcc metals10.1016/j.msea.2004.03.064 ↗
32. On the strain rate sensitivity of plastic flow in metallic glasses10.1016/j.msea.2014.12.004 ↗