Effects of nitrogen flow rate on the microstructure and mechanical and tribological properties of TiAlN films prepared via reactive magnetron sputtering
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OpenAlex topics: Metal and Thin Film Mechanics · Advanced ceramic materials synthesis · Diamond and Carbon-based Materials Research
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References (59)
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1. An overview on the use of titanium in the aerospace industry10.1016/0921-5093(96)10233-1 ↗
2. High temperature oxidation behavior and research status of modifications on improving high temperature oxidation resistance of titanium alloys and titanium aluminides: a review10.1016/j.jallcom.2016.06.212 ↗
3. Friction and wear performance of titanium alloy against tungsten carbide lubricated with phosphate ester10.1016/j.triboint.2015.10.031 ↗
4. Effect of different ZrN addition on microstructure and wear properties of titanium based coatings by laser cladding technique10.3390/coatings9040261 ↗
5. Microstructure and performance of YTaO4 coating deposited by atmospheric plasma spraying on TC4 titanium alloy surface10.1016/j.surfcoat.2021.128004 ↗
6. Anodization of titanium alloys for orthopedic applications10.1007/s11705-018-1759-y ↗
7. Surface engineering to improve the durability and lubricity of Ti–6Al–4V alloy10.1016/j.wear.2010.11.021 ↗
8. Diffusive thermal treatments combined with PVD coatings for tribological protection of titanium alloys10.1016/j.matdes.2015.10.011 ↗
9. Structural and mechanical properties of CVD deposited titanium aluminium nitride (TiAlN) thin films10.1007/s00339-017-1032-0 ↗
10. Modified TiAlN coatings prepared by d.c. pulsed magnetron sputtering10.1016/j.surfcoat.2010.09.023 ↗
11. Deposition of TiAlN coatings using reactive bipolar-pulsed direct current unbalanced magnetron sputtering10.1016/j.vacuum.2008.04.075 ↗
12. Friction and wear behavior of TiN films against ceramic and steel balls10.1016/j.triboint.2018.03.031 ↗
13. Mechanical and wear properties of TiN films on differently pretreated TiCN-based cermets10.1016/j.apsusc.2021.151180 ↗
14. Oxidation behavior and mechanisms of TiAlN/VN coatings10.1007/s11661-007-9293-4 ↗
15. Synthesis and characterization of Titanium Silicon Nitride (TiSiN) thin film: a review10.1088/1757-899X/377/1/012181 ↗
16. Interfacial and mechanical characteristics of TiN/Al composites under nanoindentation
17. Morphological and compositional studies on Al/Ti/TiN/Si, Al/TiN/Si, Al/W/Si, Al/WN/Si systems to test the diffusion barrier properties of nanoscale-thick layers between Al and Si10.3390/mi12080849 ↗
18. Tribomechanical and microstructural properties of cathodic arc-deposited ternary nitride coatings10.1016/j.ceramint.2022.04.097 ↗
19. A study on cutting and tribology performances of TiN and TiAlN coated tools10.1007/s12541-015-0103-4 ↗
20. Improved structural, mechanical, corrosion and tribocorrosion properties of Ti45Nb alloys by TiN, TiAlN monolayers, and TiAlN/TiN multilayer ceramic films10.1016/j.ceramint.2020.09.292 ↗
21. A mechanistic approach of oxidation resistance, structural and mechanical behaviour of TiAlN coatings10.1016/j.apsusc.2022.152851 ↗
22. Comparative study on crack resistance of TiAlN monolithic and Ti/TiAlN multilayer coatings10.1016/j.ceramint.2019.11.155 ↗
23. Preparation and properties of TiAlN coatings on silicon nitride ceramic cutting tools10.1016/j.ceramint.2017.10.177 ↗
24. A comparative research on TiAlN coatings reactively sputtered from powder and from smelting TiAl targets at various nitrogen flow rates10.1016/j.apsusc.2014.05.053 ↗
25. Deposition and characterization of titanium aluminum nitride coatings prepared by RF magnetron sputtering10.1016/j.apsusc.2015.02.053 ↗
26. Deposition temperature influence on the wear behaviour of carbon-based coatings deposited on hardened steel10.1016/j.apsusc.2019.01.028 ↗
27. Relationship between structure, surface topography and tribo-mechanical behavior of Ti-N thin films elaborated at different N2 flow rates10.1016/j.tsf.2021.138598 ↗
28. Influence of film thickness and Ar N2 plasma gas on the structure and performance of sputtered vanadium nitride coatings10.1016/j.surfcoat.2019.124948 ↗
29. On the role of the energetic species in TiN thin film growth by reactive deep oscillation magnetron sputtering in Ar/N210.1016/j.tsf.2017.10.052 ↗
30. Nitrogen flow rate dependence of the growth morphology of TiAlN films deposited by reactive sputtering10.1016/S0257-8972(01)01579-1 ↗
31. Effect of N2 partial pressure on the microstructure and mechanical properties of reactively sputtered (Ti,Al)N coatings10.1016/j.matlet.2005.02.068 ↗
32. Deposition of thick TiAlN coatings on 2024 Al/SiCp substrate by Arc ion plating10.1016/j.surfcoat.2008.05.041 ↗
33. Effect of varying N2 pressure on DC arc plasma properties and microstructure of TiAlN coatings10.1088/1361-6595/abaeb4 ↗
34. An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments10.1557/JMR.1992.1564 ↗
35. Effect of ion bombardment on structural, mechanical, erosion and corrosion properties of Ti-Si-C-N nanocomposite coatings10.1016/j.surfcoat.2014.09.006 ↗
36. Hard nanocomposite coatings: thermal stability, oxidation resistance and toughness10.1016/j.surfcoat.2012.05.073 ↗
37. Tribological properties of (Ti, Al)N films with different Al/Ti atomic ratios deposited by magnetron sputtering10.1088/2053-1591/ac6be1 ↗
38. Effects of nitrogen partial pressure and pulse bias voltage on (Ti,AI)N coatings by arc ion plating10.1016/S0257-8972(02)00895-2 ↗
39. Influence of nitrogen flow rate on growth of TiAlN films prepared by DC magnetron sputtering10.1179/174329407X161627 ↗
40. Studies on different oxidation behaviors of TiAlN on titanium alloy and stainless steel under thermal cycling10.1016/j.corsci.2021.109865 ↗
41. Microstructure, mechanical and tribological properties of multilayer TiAl/TiAlN coatings on Al alloys by FCVA technology10.1016/j.ceramint.2021.11.092 ↗
42. Nanocomposite Ni-TiN coatings prepared by ultrasonic electrodeposition10.1016/j.cap.2007.11.014 ↗
43. Nucleation kinetics versus nitrogen partial pressure during homoepitaxial growth of stoichiometric TiN(001): a scanning tunneling microscopy study10.1016/j.susc.2005.03.007 ↗
44. Effect of N2 flow on low carbon TiAlNC coatings10.1016/j.surfcoat.2009.05.010 ↗
45. Influence of N2 partial pressure on mechanical properties of (Ti,Al)N films deposited by reactive magnetron sputtering10.1016/j.vacuum.2009.01.001 ↗
46. Energetic deposition of metal ions: observation of self-sputtering and limited sticking for off-normal angles of incidence10.1088/0022-3727/43/6/065206 ↗
47. Microstructural evolution and microhardness of a selective-laser-melted Ti-6Al-4V alloy after post heat treatments10.1016/j.jallcom.2016.02.183 ↗
48. Relationships between hardness, Young's modulus and elastic recovery in hard nanocomposite coatings10.1016/S0257-8972(01)01714-5 ↗
49. Study on the crack resistance of CrBN composite coatings via nano-indentation and scratch tests10.1016/j.jallcom.2017.03.105 ↗
50. Wear resistance of (Ti,Al)N metallic coatings for extremal working conditions10.3390/coatings11020157 ↗
51. Evaluating mechanical properties and crack resistance of CrN, CrTiN, CrAlN and CrTiAlN coatings by nanoindentation and scratch tests10.1016/j.surfcoat.2015.11.040 ↗
52. Mechanical, tribological and corrosion performance of WBN composite films deposited by reactive magnetron sputtering10.1016/j.apsusc.2014.07.170 ↗
53. Effect of sol aging time on the wear properties of TiO2-SiO2 composite films prepared by a sol-gel method10.1016/j.triboint.2016.08.041 ↗
54. Influence of CrN, TiAlN monolayers and TiAlN/CrN multilayer ceramic films on structural, mechanical and tribological behavior of beta-type Ti45Nb alloys10.1016/j.ceramint.2019.12.046 ↗
55. On the significance of the H/E ratio in wear control: a nanocomposite coating approach to optimised tribological behaviour10.1016/S0043-1648(00)00488-9 ↗
56. Design criteria for wear-resistant nanostructured and glassy-metal coatings10.1016/j.surfcoat.2003.09.011 ↗
57. Structure and high temperature tribological behavior of TiAlN/nitride duplex treated coatings on Ti6Al4V10.1016/j.surfcoat.2016.05.016 ↗
58. Tribological behavior of TiN/TiAlN, CrN/TiAlN, and CrAlN/TiAlN coatings at elevated temperature10.1007/s11665-022-06722-7 ↗
59. Properties of TiAlN coating deposited by MPIIID on TiN substrates10.1007/s00339-016-9778-3 ↗