journal article·2023-06

Highly efficient finishing of large-sized single crystal diamond substrates by combining nanosecond pulsed laser trimming and plasma-assisted polishing

Nian Liu, Kentaro Sugimoto, Naoya Yoshitaka, Hideaki Yamada, Rongyan Sun, Kenta Arima, Kazuya Yamamura

Ceramics International· Volume 49· Issue 11
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Abstract

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Research context

OpenAlex topics: Diamond and Carbon-based Materials Research · Laser-induced spectroscopy and plasma · Advanced Surface Polishing Techniques

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